Patents by Inventor Mark K. Wagner

Mark K. Wagner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Quartz lamp heater assembly for thin film deposition apparatus
    Patent number: 5781692
    Abstract: A heater assembly for a vapor deposition apparatus is able to achieve extended operating life in the Oxygen rich low pressure high temperature atmosphere even though employing commercially available quartz lamps to generate heat. Multiple quartz lamps (1) are individually held in a socket-less support (3). The rigid lamp terminals (22 & 24) are connected to respective lengths of flexible stranded wire (30 & 28) by an INCONEL crimp insert (32 & 34), forming cables through which the lamp is connected in electrical circuit and that effectively isolate the lamp terminals from the physical effects of relative thermal expansion between heater assembly elements.
    Type: Grant
    Filed: June 4, 1997
    Date of Patent: July 14, 1998
    Assignee: TRW Inc.
    Inventor: Mark K. Wagner