Abstract: A pump mounting frame comprising a latching device for releasably mounting a pump apparatus. The latching device has a body portion having a latch aperture for receiving a latch pin; and a latching member for releasably retaining the latch pin in the latch aperture. The latching member is movable between a closed position and an open position. The latching member has a first arm for retaining the latch pin in the latch aperture when the latching member is in the closed position. The latching member has a second arm for biasing the latch pin out of the latch aperture when the latching member is displaced from the closed position to the open position. The present disclosure also relates to a method of moving one or more pumps using the pump mounting frame.

Abstract: The present disclosure relates to an abatement apparatus monitoring system. The abatement apparatus monitoring system includes a processor; and at least one load cell for outputting a load cell signal to the processor. The at least one load cell is configured to support a waste tank of an abatement apparatus. The processor is configured to monitor a level of a liquid in the waste tank in dependence on the load cell signal. The present disclosure also relates to an abatement system comprising an abatement apparatus monitoring system; and a method of monitoring operation of an abatement system.

Abstract: The present disclosure relates to a clamp having first and second body portions defining corresponding first and second mutually opposed engagement formations. The first and second body portions are movable relative to each other to displace the first and second engagement formations towards and away from one another. An actuator is provided for displacing the first and second engagement formations towards one another. The actuator includes a cam movably coupled to one of the first and second body portions and a cam follower coupled to the other of the first and second body portions. The cam has a cam surface for cooperating with the cam follower.

Abstract: The present disclosure relates to an abatement apparatus monitoring system. The abatement apparatus monitoring system includes a processor; and at least one load cell for outputting a load cell signal to the processor. The at least one load cell is configured to support a waste tank of an abatement apparatus. The processor is configured to monitor a level of a liquid in the waste tank in dependence on the load cell signal. The present disclosure also relates to an abatement system comprising an abatement apparatus monitoring system; and a method of monitoring operation of an abatement system.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: A cartridge heater apparatus includes a tube; a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.

Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.

Abstract: An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.