Abstract: A system and method for correcting surface height measurements for optical aberration is provided. Heights determined by an autofocus tool, which may depend on surface feature angles in a focus region of interest (ROI) and on the ROI location in the field of view, are corrected based on a novel error calibration. Error calibration data includes height corrections for different feature angles in images, and for multiple locations in a field of view. Height corrections are determined by weighting and combining the angle dependent error calibration data, e.g., based on a gradient (edge) angle distribution determined in the ROIs. When Z-heights are determined for multiple ROIs in a field of view, storage of image data from particular images of a global image stack may be efficiently controlled based on determining early in processing whether a particular image is a sufficiently focused “near-peak” focused image or not.

Abstract: A system and method for correcting surface height measurements for optical aberration is provided. Heights determined by an autofocus tool, which may depend on surface feature angles in a focus region of interest (ROI) and on the ROI location in the field of view, are corrected based on a novel error calibration. Error calibration data includes height corrections for different feature angles in images, and for multiple locations in a field of view. Height corrections are determined by weighting and combining the angle dependent error calibration data, e.g., based on a gradient (edge) angle distribution determined in the ROIs. When Z-heights are determined for multiple ROIs in a field of view, storage of image data from particular images of a global image stack may be efficiently controlled based on determining early in processing whether a particular image is a sufficiently focused “near-peak” focused image or not.

Abstract: Methods and systems of part programming for machine vision inspection systems are provided, which permit a user to readily define multiple image acquisition operations interspersed with associated image analysis and/or inspection operations during learn mode operations and in the resulting part program image acquisition operations for at least some of the images are arranged into a continuous motion image acquisition sequence that acquires images and stores images in a “non-interspersed” manner in order to increase the throughput of the machine vision inspection system. Image analysis/inspection operations associated with the stored images are performed subsequently by recalling the store images. The programming systems and methods disclosed herein may operate automatically to facilitate rapid programming for a variety of workpieces by relatively unskilled users, wherein the resulting programs include continuous motion image acquisition sequences.

Abstract: A system and method for correcting surface height measurements for optical aberration is provided. Heights determined by an autofocus tool, which may depend on surface feature angles in a focus region of interest (ROI) and on the ROI location in the field of view, are corrected based on a novel error calibration. Error calibration data includes height corrections for different feature angles in images, and for multiple locations in a field of view. Height corrections are determined by weighting and combining the angle dependent error calibration data, e.g., based on a gradient (edge) angle distribution determined in the ROIs. When Z-heights are determined for multiple ROIs in a field of view, storage of image data from particular images of a global image stack may be efficiently controlled based on determining early in processing whether a particular image is a sufficiently focused “near-peak” focused image or not.

Abstract: A machine vision inspection system and method for generating a workpiece image acquisition/inspection program, which can be shared by different machine vision systems having different hardware capabilities. Each system includes a movable stage for scanning and measuring selected workpiece features, and preferably includes strobe lighting to control the effective exposure time of the workpiece image. The program provides for the determination of various image acquisition parameters, such as the stage velocity, strobe light power, strobe exposure time, etc., based on a functional limit related to image smear. Thus, the program automatically adapts to any specific system, by allowing determination of optimal image acquisition parameters for that system based on the functional limit. Accordingly, the same program is usable on different systems to consistently provide a desired level of accuracy as well as optimum or near-optimum throughput, regardless of which vision system is used.

Abstract: A precision machine vision inspection system and method for increased inspection throughput. The vision inspection system includes a movable stage for scanning and measuring selected workpiece features. In prior systems, conventional interspersing of image processing and inspection operations with image acquisition operations required stopping and starting the stage motion during image acquisition, necessitating associated delays or wait-states in various operations. Such delays are avoided in this invention by acquiring images continuously, with a timing that is independent of image inspection operations, so that delays and wait-states are avoided. In addition, continuous stage motion is combined with a strobe lighting feature during the image acquisition operations to acquire blur-free images at a high rate. Improved image acquisition and image analysis routines including these features are created and stored by the system.