Patents by Inventor Mark L. F. Phillips

Mark L. F. Phillips has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170121821
    Abstract: A method of preparing at least one layer of a multilayer dielectric (MLD) film stack by producing a sol from a mixture that comprises an epoxide and at least one precursor to a metal oxide, depositing the sol on a substrate, and preparing a metal oxide layer from the deposited sol. The mixture can also include one or any combination of a solvent, water, a precursor to a glassforming oxide, at least one modifier, a cosolvent, or a porogen. Two or more layers of the film stack can be prepared in similar fashion using the same or different sols.
    Type: Application
    Filed: June 10, 2015
    Publication date: May 4, 2017
    Applicant: SBA Materials, Inc.
    Inventors: Mark L. F. Phillips, Khashayar Pakbaz
  • Patent number: 9589789
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: March 7, 2017
    Assignee: SBA Materials, Inc.
    Inventors: Mark L. F. Phillips, Travis Savage
  • Publication number: 20160111275
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Applicant: SBA Materials, Inc.
    Inventors: Mark L.F. Phillips, Travis Savage
  • Publication number: 20140120739
    Abstract: A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
    Type: Application
    Filed: October 31, 2013
    Publication date: May 1, 2014
    Inventors: Mark L.F. Phillips, Travis Savage
  • Patent number: 8481106
    Abstract: A method of fabrication of high-k paraelectric metal oxide films at low temperatures utilizing ordered mesoporous metal oxide thin films synthesized by organic templating methodology. The process consisting of (a) chemical solution deposition of periodic ordered mesoporous structures containing high-k metal oxide films, (b) removal of organic template additives, (c) infiltration of the pores with an appropriate second phase, and (d) low temperature thermal and/or annealing of infiltrated films.
    Type: Grant
    Filed: March 6, 2008
    Date of Patent: July 9, 2013
    Assignee: SBA Materials, Inc.
    Inventors: Shyama P. Mukherjee, Mark L. F. Phillips, Travis P. S. Thoms
  • Patent number: 7611731
    Abstract: The invention comprises the design, synthesis, and characterization of mesostructured silica/block copolymer composite monoliths as controlled release systems. The controlled release function is based on the formation of mesostructured silica/block copolymer architectures via surfactant-templated sol-gel processing. Multi-layered or gradient monoliths are produced by layer-by-layer sol-gel processing to provide pulsed and programmed release characteristics. A simple, rapid route to prepare combinatorial compositional monolith libraries provides high-throughput synthesis and rapid screening of the release characteristics of the monoliths.
    Type: Grant
    Filed: August 12, 2005
    Date of Patent: November 3, 2009
    Assignee: SBA Materials, Inc.
    Inventors: Michael D. Wyrsta, Mark L. F. Phillips
  • Publication number: 20090017272
    Abstract: A spin-on dielectric of novel composition formed as a sol comprising an a source of silicon such as an orthosilicate ester, alone or in combination with an alkylated orthosilicate ester, a polar solvent, water, an acid catalyst, which may be a strong acid catalyst, and an amphiphilic block copolymer surfactant, optionally including an organic acid, a co-solvent and/or a reactive solvent. Also provided is a method of formulating the sol, a film made from the spin-on dielectric that has desirable electrical and mechanical properties, methods for treating the film described to optimize the film's electrical and mechanical performance, and methods for depositing the film onto silicon, steel or other surfaces.
    Type: Application
    Filed: June 13, 2008
    Publication date: January 15, 2009
    Inventors: Mark L. F. Phillips, Travis P.S. Thoms
  • Publication number: 20080220153
    Abstract: A method of fabrication of high-k paraelectric metal oxide films at low temperatures utilizing ordered mesoporous metal oxide thin films synthesized by organic templating methodology. The process consisting of (a) chemical solution deposition of periodic ordered mesoporous structures containing high-k metal oxide films, (b) removal of organic template additives, (c) infiltration of the pores with an appropriate second phase, and (d) low temperature thermal and/or annealing of infiltrated films.
    Type: Application
    Filed: March 6, 2008
    Publication date: September 11, 2008
    Inventors: Shyama P. Mukherjee, Mark L.F. Phillips, Travis P.S. Thoms
  • Patent number: 6641743
    Abstract: A method for forming waveguides in an optical material such as lithium niobate comprises the steps of providing an exchange agent including a proton-supplying medium and a catalyst, and exposing a selected portion of the optical material to the exchange agent for a predetermined time and at a predetermined temperature. Preferably, the catalyst is a metallic cation having a valence of at least +2, and the proton-supplying medium is a weak acid with a pKa of greater than about 4.5 or a lithium-buffered (“starved”) acidic solution. The catalyst accelerates the rate at which protons are exchanged with corresponding ions in the optical material lattice, thereby reducing the time required to produce a waveguide in the exposed portion of the optical material.
    Type: Grant
    Filed: June 19, 2001
    Date of Patent: November 4, 2003
    Inventors: Mark L. F. Phillips, Travis P. S. Thoms
  • Patent number: 5814245
    Abstract: Blue, quantum-confined phosphors for field-emission displays made by reducing metal (M) sulfoaluminates at high temperature. This yields phases of the type M.sub.4 (AlO.sub.2).sub.6 S. Bulk sulfide contaminant mixed with the reduced sulfoaluminate phase is removed by treating it with a chelating agent in nonaqueous solution. A photometric cathodoluminescence efficiency of 9 lumen/watt at 1000 V for Sr.sub.3 PbS(AlO.sub.2).sub.6 is observed. Undoped Sr.sub.4 S(AlO).sub.6 displays 5 lumen/watt at 1000 V, with excellent blue chromatic saturation.
    Type: Grant
    Filed: March 27, 1997
    Date of Patent: September 29, 1998
    Assignee: Sandia Corporation
    Inventors: Mark L. F. Phillips, Lauren E. Shea
  • Patent number: 5743955
    Abstract: A method for generating well-crystallized photo- and cathodoluminescent oxide phosphor powders. The method of this invention uses hydrothermal synthesis and annealing to produce nearly monosized (RE.sub.1-x Ln.sub.x)(P.sub.1-y V.sub.y)O.sub.4 (Ln.dbd.Ce.fwdarw.Lu) phosphor grains with crystallite sizes from 0.04 to 5 .mu.m. Such phosphors find application in cathode-ray tube, flat-panel, and projection displays.
    Type: Grant
    Filed: October 23, 1995
    Date of Patent: April 28, 1998
    Inventor: Mark L. F. Phillips