Abstract: Described herein are methods of forming dielectric films comprising silicon, oxide, and optionally nitrogen, carbon, hydrogen, and boron. Also disclosed herein are the methods to form dielectric films or coatings on an object to be processed, such as, for example, a semiconductor wafer.

Abstract: Described herein are methods of forming dielectric films comprising silicon, oxide, and optionally nitrogen, carbon, hydrogen, and boron. Also disclosed herein are the methods to form dielectric films or coatings on an object to be processed, such as, for example, a semiconductor wafer.

Abstract: A dialysis probe for insertion into the human or animal body includes a tubular dialysis membrane (2) closed at its distal end (3); an inlet tube (4) for supplying perfusion fluid into the body of the dialysis membrane (2); and an outlet tube (5) for the exit of perfusion fluid from the body of the dialysis membrane, the inlet and outlet tubes being provided at the proximal end of the tubular dialysis membrane (2) and making sealed connection with the interior of the dialysis membrane. An anchoring member (7, 20) is provided at the proximal end of the probe and in a first embodiment comprises a plate-like member for securing directly to the body of the subject, and in a second embodiment comprises a stopper cap (21, 22, 23, 24) for plugging a cannula itself attached to the body of the subject. The anchoring member has all the remaining component parts of the probe bounded, directly or indirectly, to it.