Abstract: System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.

Abstract: This invention describes a device for optical stimulation of cells and other biological structures. It has an ability to target multiple cells and/or multiple sub-cellular targets. The stimulation optical pattern on each cell can be independently controlled with individual frequencies. The light sensitivity of the cells can be imparted as a result of genetic expression of surface and/or subsurface proteins, chemical modification of existing proteins, or via the release of caged entities which in turn act to stimulate the cell through chemical means. The embodiment is capable of functioning on neurons but can also be used for other cells. It can perform optimal stimulation with sub-cellular resolutions, record the activity of the targeted cells and perform processing to ensure calibration.

Abstract: A microscopic imaging system includes a receiving means (2) for receiving an article (4) to be imaged, a linear optical detector (16), focussing means (10) for focussing an image of an article in the receiving means onto the detector, scanning means (6) for producing relative movement between the image and the detector in a direction substantially perpendicular to the axis of the detector, and an optical correcting element (14) for reducing aberrations in the image focussed onto the detector.

Abstract: An imaging apparatus comprising: A spatial light modulator (30) operable to receive incident light (34) representing an incident light image and to intensity modulate said incident light to form spatially modulated (38) light; and an image capture device (42) operable to receive said spatially modulated light and to detect an intensity value for different portions of said spatially modulated light to form a modulated light image therefrom; wherein said spatial light modulator attenuates different parts of said incident light by different proportions such that intensity values of said incident light image are given by a combination of intensity values of said modulated light image captured by said image capture device and data representing proportions of attenuation applied to corresponding parts of said incident light image by said spatial light modulator.

Abstract: An imaging apparatus comprising: a capture device (4,5) operate e to capture a sequence of component images of a target (2) to be imaged; and an image generator (4,5) operable to generate a plurality of output images; wherein the image generator is operable to generate respective output images from corresponding subsets of two or more component images, and the capture device is operable to capture the component images such that the component images of one subset are interleaved with the component images of other subsets in the sequence of component images.

Abstract: A method and apparatus for generating a beam of light having extended depth of focus. The apparatus comprises, for instance, a binary phase mask that generates a diffraction pattern including a bright main ring and a plurality of side-lobe rings, an annular aperture mask that passing only a portion of the diffraction pattern, and a lens that causes light passing through the annular aperture to converge toward and cross an optical axis. Where the converging light crosses the optical axis, constructive interference takes place, thereby generating a beam of light that has extended depth of focus.

Abstract: A microscopic imaging system includes a receiving means (2) for receiving an article (4) to be imaged, a linear optical detector (16), focussing means (10) for focussing an image of an article in the receiving means onto the detector, scanning means (6) for producing relative movement between the image and the detector in a direction substantially perpendicular to the axis of the detector, and an optical correcting element (14) for reducing aberrations in the image focussed onto the detector.

Abstract: A method of improving stability for CD-SEM measurements of photoresist, in particular 193 nm photoresist, and of reducing shrinkage of 193 nm photoresist during CD-SEM measurements. The photoresist is exposed to a dose of electrons or other stabilizing beam prior to or during CD measurement. One embodiment of the invention includes multiplexing of the SEM electron beam.

Abstract: A method and apparatus for generating a beam of light having extended depth of focus. The apparatus comprises, for instance, a binary phase mask that generates a diffraction pattern including a bright main ring and a plurality of side-lobe rings, an annular aperture mask passing only a portion of the diffraction pattern, and a lens that causes light passing through the annular aperture to converge toward and cross an optical axis. Where the converging light crosses the optical axis, constructive interference takes place, thereby generating a beam of light that has extended depth of focus.