Patents by Inventor Mark Neill

Mark Neill has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130341504
    Abstract: System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.
    Type: Application
    Filed: June 7, 2013
    Publication date: December 26, 2013
    Applicant: KLA -Tencor Corporation,
    Inventors: Mark Neill, Mehran Nasser-Ghodsi, Christopher Sears