Patents by Inventor Mark Odom

Mark Odom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Purge process conducted in the presence of a purge plasma
    Publication number: 20060172545
    Abstract: The present invention provides, in one embodiment, a method for reducing defects associated with a plasma deposition or etching process. In this particular embodiment, the method includes creating a plasma in a deposition or etching chamber (140) and purging undesirable species from the deposition or etching chamber (150) in the presence of the plasma.
    Type: Application
    Filed: February 2, 2005
    Publication date: August 3, 2006
    Applicant: Texas Instruments, Inc.
    Inventors: Kenneth Hewes, Mark Odom, Michael Satterfield, Sirisha Kuchimanchi, Sean Collins, Zaid Nahas