Patents by Inventor Mark P. Sponholz

Mark P. Sponholz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for control of contours formed by etching substrates
    Patent number: 7147789
    Abstract: The present invention provides a process for controlling the contour of a feature in a transition area made by etching a substrate. This process includes applying a patterned resist mask to the substrate to form a plurality of mask openings and mask land areas. The mask land areas are sized and spaced to a control the contour of a feature on the substrate.
    Type: Grant
    Filed: September 15, 2003
    Date of Patent: December 12, 2006
    Assignee: Hutchinson Technology Incorporated
    Inventors: Catherine A. Morley, Mark P. Sponholz, Steven R. Young, Steven A. Fank, Jacob D. Bjorstrom