Patents by Inventor Mark Petrus Ubbink

Mark Petrus Ubbink has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, composite material and manufacturing method
    Patent number: 8848169
    Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device may be capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The lithographic apparatus further includes a substrate table constructed to hold a substrate and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus may be provided with a composite material wherein a layer of carbon fiber and a layer of titanium is provided within the composite.
    Type: Grant
    Filed: May 15, 2009
    Date of Patent: September 30, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Mark Scholten, Jacob Kleijn, Stephan Christiaan Quintus Libourel, Mark Petrus Ubbink
  • LITHOGRAPHIC APPARATUS, COMPOSITE MATERIAL AND MANUFACTURING METHOD
    Publication number: 20090310114
    Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device may be capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The lithographic apparatus further includes a substrate table constructed to hold a substrate and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus may be provided with a composite material wherein a layer of carbon fiber and a layer of titanium is provided within the composite.
    Type: Application
    Filed: May 15, 2009
    Publication date: December 17, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Mark Scholten, Jacob Kleijn, Stephan Christiaan Quintus Libourel, Mark Petrus Ubbink