Patents by Inventor Mark Phillip Wright

Mark Phillip Wright has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Arc suppression plate for a plasma processing chamber
    Patent number: 7763147
    Abstract: A plasma processing chamber configured to generate a plasma is provided. The plasma processing chamber includes a substrate support assembly which includes a substrate support that is capable of supporting a substrate. The plasma processing chamber further includes a plate having a bottom surface and a top surface, and the plate is coupled to the plasma processing chamber. The plate further includes a plurality of countersunk regions for receiving a corresponding plurality of fasteners that enable coupling of the plate to the plasma processing chamber, and the plate has a lip that surrounds an outer region of the plate near the top surface of the plate. The substrate support is configured to be connected to the top surface of the plate.
    Type: Grant
    Filed: May 15, 2006
    Date of Patent: July 27, 2010
    Assignee: Lam Research Corporation
    Inventors: Roger James Schutz, Mark Phillip Wright