Patents by Inventor Mark Pilloff

Mark Pilloff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flexible shape identification for optical proximity correction in semiconductor fabrication
    Patent number: 7337424
    Abstract: Transient edges are used to define shapes in an integrated circuit layout for optical proximity correction. A first variation of the shape includes a first edge, a second edge satisfying an edge transition angle condition in relation to the first edge, and one or more first transition edges connected between the first edge and the second edge. A second variation of the shape includes a third edge, a fourth edge satisfying the same edge transition angle condition in relation to the third edge, and one or more second transition edges connected between the third edge and the fourth edge. Although the first transition edges are different from the second transition edges, both the first and second variations of the shape are identified as having the same shape, thereby allowing flexibility and efficiency in the shape identification process for optical proximity correction.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: February 26, 2008
    Assignee: Aprio Technologies, Inc.
    Inventors: Shao-Po Wu, Xin Wang, Mark Pilloff
  • Flexible shape identification for optical proximity correction in semiconductor fabrication
    Publication number: 20060236287
    Abstract: Transient edges are used to define shapes in an integrated circuit layout for optical proximity correction. A first variation of the shape includes a first edge, a second edge satisfying an edge transition angle condition in relation to the first edge, and one or more first transition edges connected between the first edge and the second edge. A second variation of the shape includes a third edge, a fourth edge satisfying the same edge transition angle condition in relation to the third edge, and one or more second transition edges connected between the third edge and the fourth edge. Although the first transition edges are different from the second transition edges, both the first and second variations of the shape are identified as having the same shape, thereby allowing flexibility and efficiency in the shape identification process for optical proximity correction.
    Type: Application
    Filed: March 24, 2005
    Publication date: October 19, 2006
    Inventors: Shao-Po Wu, Xin Wang, Mark Pilloff