Patents by Inventor Mark R. Harless

Mark R. Harless has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection tool with a 3D point sensor to develop a focus map
    Patent number: 7170075
    Abstract: An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: January 30, 2007
    Assignee: Rudolph Technologies, Inc.
    Inventors: Norman L. Oberski, Mark R. Harless
  • Data transfer device with data frame grabber with switched fabric interface wherein data is distributed across network over virtual lane
    Patent number: 7111095
    Abstract: A frame grabber with switched fabric interface where in varying embodiments the fabric interface may be one of InfiniBand, Star Fabric, or PCI Express or the like.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: September 19, 2006
    Assignee: August Technology Corp.
    Inventors: Cory M. Watkins, Mark R. Harless
  • Imaging system using theta-theta coordinate stage and continuous image rotation to compensate for stage rotation
    Publication number: 20040179096
    Abstract: A method for controlling a theta-theta coordinate stage moves an object relative to an imaging system. While moving the object, the object image is rotated to compensate for object rotation. Orientations of features in the image are preserved, and removal of apparent rotation in the image reduces operator confusion while directing movement of the object. Angular velocity of the object motion is controlled so that image shift speed is independent of the radial position of the point being viewed. An edge detector measures the edge position of the object while the theta-theta coordinate stage rotates the object. A prealignment process determines position and orientation of the object from measured edge positions. A further alignment process uses automated pattern recognition to identify features on the object when the image is rotated so that orientations of the feature are approximately known.
    Type: Application
    Filed: September 30, 2003
    Publication date: September 16, 2004
    Applicant: August Technology Corp
    Inventors: Mark R. Harless, Cory M. Watkins
  • Inspection tool with a 3D point sensor to develop a focus map
    Publication number: 20040056173
    Abstract: An inspection system, and process for use thereof, allows for inspecting of semiconductors or like substrates. The inspection system keeps the focus of the sensor within the depth of field of the lens used. The system specifically uses the process of making a separate pass over the wafer surface using a 3D point sensor before the inspection of the wafer begins.
    Type: Application
    Filed: July 18, 2003
    Publication date: March 25, 2004
    Applicant: August Technology Corp.
    Inventors: Norman L. Oberski, Mark R. Harless
  • Data grabber with switched fabric interface
    Publication number: 20030221042
    Abstract: A frame grabber with switched fabric interface where in varying embodiments the fabric interface may be one of InfiniBand, Star Fabric, or PCI Express or the like.
    Type: Application
    Filed: April 25, 2003
    Publication date: November 27, 2003
    Applicant: August Technology Corp.
    Inventors: Cory M. Watkins, Mark R. Harless