Patents by Inventor Mark R. Litchy

Mark R. Litchy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10697879
    Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream, of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: June 30, 2020
    Assignee: Fluid Management Technologies, Inc.
    Inventors: David Blackford, Derek Oberreit, Donald C. Grant, Gary Van Schooneveld, Mark R. Litchy
  • Publication number: 20180224366
    Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream, of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.
    Type: Application
    Filed: April 5, 2018
    Publication date: August 9, 2018
    Inventors: David Blackford, Derek Oberreit, Donald C. Grant, Gary Van Schooneveld, Mark R. Litchy
  • Patent number: 9958371
    Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: May 1, 2018
    Assignee: Fluid Measurement Technologies, Inc.
    Inventors: David Blackford, Derek Oberreit, Donald C. Grant, Gary Van Schooneveld, Mark R. Litchy
  • Patent number: 9513198
    Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
    Type: Grant
    Filed: September 19, 2013
    Date of Patent: December 6, 2016
    Assignee: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy
  • Publication number: 20150308940
    Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.
    Type: Application
    Filed: March 23, 2015
    Publication date: October 29, 2015
    Inventors: David Blackford, Derek Oberreit, Donald C. Grant, Gary Van Schooneveld, Mark R. Litchy
  • Patent number: 9086350
    Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: July 21, 2015
    Assignee: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy, David Blackford, Derek R. Oberreit
  • Publication number: 20140013831
    Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
    Type: Application
    Filed: September 19, 2013
    Publication date: January 16, 2014
    Applicant: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy
  • Patent number: 8573034
    Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: November 5, 2013
    Assignee: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy
  • Publication number: 20120312084
    Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
    Type: Application
    Filed: August 22, 2012
    Publication date: December 13, 2012
    Inventors: Donald C. Grant, Mark R. Litchy, David Blackford
  • Patent number: 8272253
    Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
    Type: Grant
    Filed: January 21, 2009
    Date of Patent: September 25, 2012
    Assignee: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy, David Blackford
  • Publication number: 20110214489
    Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.
    Type: Application
    Filed: May 10, 2011
    Publication date: September 8, 2011
    Inventors: Donald C. Grant, Mark R. Litchy
  • Publication number: 20090183554
    Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.
    Type: Application
    Filed: January 21, 2009
    Publication date: July 23, 2009
    Inventors: Donald C. Grant, Mark R. Litchy, David Blackford
  • Patent number: 6947126
    Abstract: A dilution apparatus for continuously producing a diluted liquid sample, e.g., a chemical-mechanical polishing slurry, for analysis, e.g., particle size distribution, comprises a mixer manifold, a diluent-introducing means, e.g., a flow controlling device, for introducing a diluent, e.g., water, into the mixer manifold, and a liquid sample introducing means, e.g., a pump, for introducing the sample into the mixer manifold. The mixer manifold includes a plurality of ports for receiving a plurality of liquid samples from a plurality of sample points. The dilution apparatus can include a second mixer manifold for continuously producing a second diluted liquid sample, and it can be associated with one or more sensors operable to measure sample properties, e.g., an optical particle counter. The sensors can be operated simultaneously, and the measurements of the sensors can be compared.
    Type: Grant
    Filed: December 18, 2002
    Date of Patent: September 20, 2005
    Assignee: The BOC Group, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy, Mary Kristin Nicholes
  • Patent number: 6783429
    Abstract: An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described.
    Type: Grant
    Filed: August 9, 2002
    Date of Patent: August 31, 2004
    Assignee: The BOC Group, Inc.
    Inventors: Mary Kristin Nicholes, Stephen John Carlson, Mark R. Litchy
  • Publication number: 20030174306
    Abstract: A dilution apparatus for continuously producing a diluted liquid sample, e.g., a chemical-mechanical polishing slurry, for analysis, e.g., particle size distribution, comprises a mixer manifold, a diluent-introducing means, e.g., a flow controlling device, for introducing a diluent, e.g., water, into the mixer manifold, and a liquid sample introducing means, e.g., a pump, for introducing the sample into the mixer manifold. The mixer manifold includes a plurality of ports for receiving a plurality of liquid samples from a plurality of sample points. The dilution apparatus can include a second mixer manifold for continuously producing a second diluted liquid sample, and it can be associated with one or more sensors operable to measure sample properties, e.g., an optical particle counter. The sensors can be operated simultaneously, and the measurements of the sensors can be compared.
    Type: Application
    Filed: December 18, 2002
    Publication date: September 18, 2003
    Inventors: Donald C. Grant, Mark R. Litchy, Mary Kristin Nicholes
  • Publication number: 20030076495
    Abstract: An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described.
    Type: Application
    Filed: August 9, 2002
    Publication date: April 24, 2003
    Inventors: Mary Kristin Nicholes, Stephen John Carlson, Mark R. Litchy
  • Patent number: 6310017
    Abstract: A cleaning solution composition for use on electronic component and equipment employed in the cleaning of these components. The cleaning solution comprises ultrapure water containing carbonic acid plus an oxidizing agent selected from hydrogen peroxide, ozone, and combinations thereof. The invention includes a method of removing contaminants from electronic components, containers and associated equipment using the cleaning solution of novel composition. Further, the invention includes a method of preparing the novel cleaning solution composition by contacting carbon dioxide gas with ultrapure water and adding an oxidizing agent, or by contacting carbon dioxide gas with an ultrapure water solution of oxidizing agent.
    Type: Grant
    Filed: February 1, 1999
    Date of Patent: October 30, 2001
    Assignee: CT Associates, Inc.
    Inventors: Donald C. Grant, Mark R. Litchy