Patents by Inventor Mark Senko

Mark Senko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for performing photothermal measurements and relaxation compensation
    Patent number: 8111399
    Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
    Type: Grant
    Filed: June 30, 2009
    Date of Patent: February 7, 2012
    Assignee: KLA-Tencor Corporation
    Inventors: Lawrence D. Rotter, David Y. Wang, Derrick Shaughnessy, Mark Senko
  • SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION
    Publication number: 20100328670
    Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
    Type: Application
    Filed: June 30, 2009
    Publication date: December 30, 2010
    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION
    Inventors: Lawrence D. Rotter, David Y. Wang, Derrick Shaughnessy, Mark Senko