Patents by Inventor Mark Stephen Puttock

Mark Stephen Puttock has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chucks
    Patent number: 6256186
    Abstract: An electrostatic chuck 12 for a plasma reactor apparatus 10 comprises a base metallic section 23, a pair of electrodes 24 set in bonding material 27 and electrically insulated from the base by a plate 29 and a thick dielectric layer 20 (e.g. 0.5 to 1.5 mm), which covers the electrodes 24 and bonding material 27 and forms the support surfaces for wafers 31.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: July 3, 2001
    Assignee: Trikon Equipments Limited
    Inventors: Kevin Powell, David Andrew Tossell, Alan Victor Iacopi, Mark Stephen Puttock