Abstract: A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.

Abstract: A method of teaching the target body edge position includes moving a photoelectric sensor optical axis to an initial position specified on the target body edge outer side installed so that the target body main surface is horizontal, and specified upper or lower than the target body, repeating an optical axis forward cycle until the target body edge is detected by the sensor, and obtaining the target body edge detected point position based on the substrate transfer robot posture when the target body edge is detected by the sensor to store the edge position. A movement cycle includes a series of movements including lifting or lowering passing through a height level of the target body, forward movement by a first movement amount in a horizontal scanning direction toward the target body, lowering or lifting passing through the level, and forward movement by the first movement amount in the scanning direction.

Abstract: A substrate transfer robot, first and second sensors are provided in a hand such that a planar-view intersection point of optical axes is located on a center of a substrate when the hand holds the substrate in planar view, and a control device operates an arm, scans a target placed at a teaching position with the first and second sensors, and acquires the teaching position when the target is located at the planar-view intersection point of the optical axes.

Abstract: A method of teaching the target body edge position includes moving a photoelectric sensor optical axis to an initial position specified on the target body edge outer side installed so that the target body main surface is horizontal, and specified upper or lower than the target body, repeating an optical axis forward cycle until the target body edge is detected by the sensor, and obtaining the target body edge detected point position based on the substrate transfer robot posture when the target body edge is detected by the sensor to store the edge position. A movement cycle includes a series of movements including lifting or lowering passing through a height level of the target body, forward movement by a first movement amount in a horizontal scanning direction toward the target body, lowering or lifting passing through the level, and forward movement by the first movement amount in the scanning direction.

Abstract: A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

Abstract: A substrate holding hand is provided, which holds a disc-shaped substrate and includes a base plate, and guide members, each provided to the base plate, formed in an L-shape, and formed so that an inner wall surface thereof is bent when seen horizontally. The inner wall surface of the guide member is formed so that an angle between a first inner wall part that is the furthest portion of the inner wall surface from a bottom surface of the inner wall surface and the bottom surface is larger than an angle between a second inner wall part that is the nearest portion of the inner wall surface to the bottom surface and the bottom surface.

Abstract: A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.