Patents by Inventor Mark Unrath

Mark Unrath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240293897
    Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.
    Type: Application
    Filed: May 14, 2024
    Publication date: September 5, 2024
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Patrick RIECHEL, Mark UNRATH, Jake ROBERTS, Joseph HASTY
  • Publication number: 20240227071
    Abstract: Numerous embodiments are disclosed. In one, a laser-processing apparatus includes a workpiece handling system having an unwind assembly including an unwind spindle operative to support an unwind material roll of a workpiece, and a rewind assembly including a rewind spindle operative to support a rewind material roll of the workpiece and receive the workpiece from the laser-processing apparatus. In another, a laser-processing apparatus includes a workpiece handling system having a web handling assembly attached to an upper structure configured to support an unwind spindle supporting a unwind material roll of a workpiece, wherein the web handling assembly is positioned within a space above the fixture. The laser-processing apparatus further includes a web tensioner assembly configured to apply a biasing force on the tensioning roller to maintain the workpiece in a desired state of tension.
    Type: Application
    Filed: February 14, 2022
    Publication date: July 11, 2024
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES INCORPORATED
    Inventors: Corie NEUFELD, Mark KOSMOWSKI, Mark UNRATH
  • Publication number: 20240131622
    Abstract: Numerous embodiments are disclosed. In one, a laser-processing apparatus includes a workpiece handling system having an unwind assembly including an unwind spindle operative to support an unwind material roll of a workpiece, and a rewind assembly including a rewind spindle operative to support a rewind material roll of the workpiece and receive the workpiece from the laser-processing apparatus. In another, a laser-processing apparatus includes a workpiece handling system having a web handling assembly attached to an upper structure configured to support an unwind spindle supporting a unwind material roll of a workpiece, wherein the web handling assembly is positioned within a space above the fixture. The laser-processing apparatus further includes a web tensioner assembly configured to apply a biasing force on the tensioning roller to maintain the workpiece in a desired state of tension.
    Type: Application
    Filed: February 14, 2022
    Publication date: April 25, 2024
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES INCORPORATED
    Inventors: Corie NEUFELD, Mark KOSMOWSKI, Mark UNRATH
  • Publication number: 20240017350
    Abstract: A laser-processing apparatus can carry out a process to form a via in a workpiece, having a first material formed on a second material, by directing laser energy onto the workpiece such that the laser energy is incident upon the first material, wherein the laser energy has a wavelength to which the first material is more reflective than the second material. The apparatus can include a back-reflection sensing system operative to capture a back-reflection signal corresponding to a portion of laser energy directed to the workpiece and reflected by the first material and generate a sensor signal based on the captured back-reflection signal; and a controller communicatively coupled to an output of the back-reflection sensing system, wherein the controller is operative to control a remainder of the process by which the via is formed based on the sensor signal.
    Type: Application
    Filed: November 23, 2021
    Publication date: January 18, 2024
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Jan KLEINERT, Ruolin CHEN, James BROOKHYSER, Mark UNRATH, Honghua HU
  • Publication number: 20240001484
    Abstract: A method includes receiving, during a period of time, a continuous wave laser beam at an acousto-optic deflector (AOD) having a first AOD and a second AOD. A plurality of laser pulses is generated from the received beam using the first acousto-optic deflector (AOD) to the laser beam along a first axis and using the second AOD to deflect the laser beam deflected by the first AOD along a second axis.
    Type: Application
    Filed: June 30, 2023
    Publication date: January 4, 2024
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Mark UNRATH, William JORDENS, James ISMAIL, Hisashi MATSUMOTO, Brian LINEBURG
  • Publication number: 20230390866
    Abstract: Numerous embodiments of optical relay systems are disclosed. In one embodiment, a laser-processing apparatus includes an optical relay system configured to correct for beam placement errors by maintaining the optical path length of a beam of laser energy between a first positioner and a scan lens. In another embodiment, the optical relay system may include a first lens, a second lens, and a zoom lens assembly arranged between the first lens and the second lens, wherein the zoom lens assembly includes a first lens group and a second lens group. The zoom lens assembly may be movable relative to the first lens and the second lens (e.g., mounted on a positioner, such as a motion stage). The distance between the lenses of the first lens group and the distance between the lenses of the second lens group may be fixed or variable.
    Type: Application
    Filed: November 23, 2021
    Publication date: December 7, 2023
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: James BROOKHYSER, Jan KLEINERT, Jered RICHTER, Mark UNRATH
  • Publication number: 20220168847
    Abstract: Numerous embodiments are disclosed. Many of which relate to methods of forming vias in workpieces such as printed circuit boards. Some embodiments relates techniques for indirectly ablating a region of an electrical conductor structure of, for example, a printed circuit board by spatially distributing laser energy throughout the region before the electrical conductor is indirectly ablated. Other embodiments relate to techniques for temporally-dividing laser pulses, modulating the optical power within laser pulses, and the like.
    Type: Application
    Filed: May 29, 2020
    Publication date: June 2, 2022
    Inventors: Jan KLEINERT, Zhibin LIN, Joel SCHRAUBEN, Mark UNRATH, Honghua HU, Ruolin CHEN, Chuan YANG, Geoffrey LOTT, Daragh FINN
  • Publication number: 20210362277
    Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to use of beam characterization tools to facilitate adaptive processing, process control and other desirable features. Other embodiments relate to laser power sensors incorporating integrating spheres. Still other embodiments relate to workpiece handling systems capable of simultaneously providing different workpieces to a common laser-processing apparatus. A great number of other embodiments and arrangements are also detailed.
    Type: Application
    Filed: June 4, 2019
    Publication date: November 25, 2021
    Inventors: Patrick Riechel, Mark Unrath, Jake Roberts, Joseph Hasty, James Brookhyser, Zachary Dunn, Christopher Hamner, Geoffrey Lott, Jacob Magers, Jack Rundel, Jeffrey Howerton, Jan Kleinert, Doug Hall, Gary Larsen, Julie Wilson, Lee Petersen, Mark Wegner, Kurt Eaton
  • Patent number: 10213871
    Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: February 26, 2019
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy Moore
  • Publication number: 20190001442
    Abstract: Apparatus and techniques for laser-processing workpieces can be improved, and new functionalities can be provided. Some embodiments discussed relate to processing of workpieces in a manner resulting in enhanced accuracy, throughput, etc. Other embodiments relate to realtime Z-height measurement and, when suitable, compensation for certain Z-height deviations. Still other embodiments relate to modulation of scan patterns, beam characteristics, etc., to facilitate feature formation, avoid undesirable heat accumulation, or otherwise enhance processing throughput. A great number of other embodiments and arrangements are also detailed.
    Type: Application
    Filed: September 8, 2016
    Publication date: January 3, 2019
    Inventors: Mark Unrath, Chuan Yang, Jan Kleinert, Mark Peeples, Hugh Owens, Gwendolyn Byrne, Haibin Zhang, Justin Redd, Corie Neufeld, James D. Brookhyser, Yasu Osako, Mehmet Alpay, Zhibin Lin, Patrick Riechel, Tim Nuckolls, Hisashi Matsumoto, Chris Ryder
  • Patent number: 10118252
    Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: November 6, 2018
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Yasu Osako, Mark Unrath, Mark Kosmowski
  • Publication number: 20150239064
    Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.
    Type: Application
    Filed: May 8, 2015
    Publication date: August 27, 2015
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Yasu Osako, Mark Unrath, Mark Kosmowski
  • Patent number: 9029731
    Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.
    Type: Grant
    Filed: December 3, 2007
    Date of Patent: May 12, 2015
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Yasu Osako, Mark Unrath, Mark Kosmowski
  • Publication number: 20140110384
    Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.
    Type: Application
    Filed: October 21, 2013
    Publication date: April 24, 2014
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy MOORE
  • Patent number: 8497450
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: July 30, 2013
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Wai Lo, Clint Vandergiessen, Keith Grant
  • Patent number: 8238007
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Grant
    Filed: December 26, 2006
    Date of Patent: August 7, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Wai Lo, Clint Vandergiessen, Keith Grant
  • Patent number: 7985942
    Abstract: Laser pulse energy adjustments are motivated by an understanding of the effect of laser pulse width variations among different lasers on satisfying a quality metric associated with a laser-processed target. In a preferred embodiment, the adjustments normalize this effect among different lasers drilling vias in a target specimen. The number of pulses delivered to the target specimen to form each via can be modified, based on the pulse energy applied to the via location, to control different via quality metrics.
    Type: Grant
    Filed: May 17, 2005
    Date of Patent: July 26, 2011
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Weisheng Lei, Glenn Simenson, Jeff Howerton, Mark Unrath
  • Publication number: 20080179304
    Abstract: Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.
    Type: Application
    Filed: December 3, 2007
    Publication date: July 31, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Yasu Osako, Mark Unrath, Mark Kosmowski
  • Publication number: 20080093349
    Abstract: A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
    Type: Application
    Filed: October 26, 2007
    Publication date: April 24, 2008
    Applicant: Electro Scientific Industries, Inc.
    Inventors: Kelly Bruland, Mark Unrath, Stephen Swaringen, Ho Lo, Clint Vandergiessen, Keith Grant
  • Patent number: 7345448
    Abstract: Preferred embodiments of the invention implement techniques for modifying the command trajectory, the architecture of a servomechanism control system, or both, to reduce the servo error during and/or after the command trajectory. An iterative refinement procedure generates for use by the servomechanism control system a corrective input, du, which significantly reduces the error between the desired and actual servomechanism control system outputs. In one embodiment, a uniquely identified plant model is employed in the iterative refinement procedure to compute an approximate gradient that improves the performance and reliability of the refinement procedure. In another embodiment, the actual plant response is used in place of the identified model in the iterative refinement procedure. This is accomplished by time-reversing the stored error signal from a training run, before applying it to the plant to generate an update to the corrective input signal du.
    Type: Grant
    Filed: May 12, 2005
    Date of Patent: March 18, 2008
    Assignee: Electro Scientific Industries, Inc.
    Inventors: David Watt, Mehmet Alpay, Mark Unrath, John Wen, Ben Potsaid