Patents by Inventor Mark Wilcosson

Mark Wilcosson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of preventing premature drying
    Patent number: 8277570
    Abstract: A method for processing a substrate includes receiving a substrate and processing the substrate using a first fluid meniscus and a second fluid meniscus. The first fluid meniscus and the second fluid meniscus are applied to a surface of the substrate such that the first fluid meniscus is spaced apart from the second fluid meniscus by a transition region. A saturated gas chemistry is applied to the surface of the substrate at the transition region. The saturated gas chemistry is configured to maintain moisture in the transition region so as to prevent drying of the surface of the substrate in the transition region, before the second fluid meniscus is applied to the surface of the substrate.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: October 2, 2012
    Assignee: LAM Research Corporation
    Inventors: Seokmin Yun, Mark Wilcosson
  • Method of Preventing Premature Drying
    Publication number: 20110294301
    Abstract: A method for processing a substrate includes receiving a substrate and processing the substrate using a first fluid meniscus and a second fluid meniscus. The first fluid meniscus and the second fluid meniscus are applied to a surface of the substrate such that the first fluid meniscus is spaced apart from the second fluid meniscus by a transition region. A saturated gas chemistry is applied to the surface of the substrate at the transition region. The saturated gas chemistry is configured to maintain moisture in the transition region so as to prevent drying of the surface of the substrate in the transition region, before the second fluid meniscus is applied to the surface of the substrate.
    Type: Application
    Filed: August 10, 2011
    Publication date: December 1, 2011
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Seokmin Yun, Mark Wilcosson