Patents by Inventor Mark Wilcoxson

Mark Wilcoxson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070240737
    Abstract: A method for cleaning the surface of a semiconductor wafer is disclosed. A first cleaning solution is applied to the wafer surface to remove contaminants on the wafer surface. The first cleaning solution is removed with some of the contaminants on the wafer surface. Next, an oxidizer solution is applied to the wafer surface. The oxidizer solution forms an oxidized layer on remaining contaminants. The oxidizer solution is removed and then a second cleaning solution is applied to the wafer surface. The second cleaning solution is removed from the wafer surface. The cleaning solution is configured to substantially remove the oxidized layer along with the remaining contaminants.
    Type: Application
    Filed: June 28, 2006
    Publication date: October 18, 2007
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Ji Zhu, Seokmin Yun, Mark Wilcoxson, John de Larios
  • Patent number: 7239737
    Abstract: A graphical user interface for controlling analysis of a wafer map is provided. The user interface provides a graphical selection control for selecting a region of the wafer map for statistical analysis. The user interface is configured to generate statistical data for the selected region to complete the statistical analysis. The statistical data is then displayed for the selected region. Re-generation of the statistical data for display is performed upon detecting a change in the selected region.
    Type: Grant
    Filed: December 24, 2002
    Date of Patent: July 3, 2007
    Assignee: Lam Research Corporation
    Inventors: Jorge Luque, Andrew D. Bailey, III, Mark Wilcoxson
  • Publication number: 20060124153
    Abstract: A method for removing post-processing residues in a single wafer cleaning system is provided. The method initiates with providing a first heated fluid to a proximity head disposed over a substrate. Then, a meniscus of the first fluid is generated between a surface of the substrate and an opposing surface of the proximity head. The substrate is linearly moved under the proximity head. A single wafer cleaning system is also provided.
    Type: Application
    Filed: February 17, 2005
    Publication date: June 15, 2006
    Applicant: Lam Research Corp.
    Inventors: Seokmin Yun, John Boyd, Mark Wilcoxson
  • Publication number: 20060011583
    Abstract: A plasma processing system for processing a substrate, is disclosed. The plasma processing system includes a single chamber, substantially azimuthally symmetric plasma processing chamber within which a plasma is both ignited and sustained for the processing. The plasma processing chamber has no separate plasma generation chamber. The plasma processing chamber has an upper end and a lower end. The plasma processing chamber includes a material that does not substantially react with the reactive gas chemistries that are delivered into the plasma processing chamber. In addition, the reactant gases that are flown into the plasma processing chamber are disclosed.
    Type: Application
    Filed: September 19, 2005
    Publication date: January 19, 2006
    Inventors: Andrew Bailey, Alan Schoepp, David Hemker, Mark Wilcoxson
  • Publication number: 20040070623
    Abstract: A graphical user interface for controlling analysis of a wafer map is provided. The user interface provides a graphical selection control for selecting a region of the wafer map for statistical analysis. The user interface is configured to generate statistical data for the selected region to complete the statistical analysis. The statistical data is then displayed for the selected region. Re-generation of the statistical data for display is performed upon detecting a change in the selected region.
    Type: Application
    Filed: December 24, 2002
    Publication date: April 15, 2004
    Applicant: Lam Research Corporation
    Inventors: Jorge Luque, Andrew D. Bailey, Mark Wilcoxson