Patents by Inventor Marko J. Kukkonen

Marko J. Kukkonen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Source chemical container assembly
    Patent number: 6889864
    Abstract: The invention relates to a source chemical container assembly, comprising a metal container functioning as a vacuum chamber and provided with a removable closure, which removable closure seals against the metal container with a metal seal. In order to facilitate easy recharging of the container assembly, compressive force is applied to the metal seal through a tension chain. In a preferred embodiment of the invention the metal seal and the tension chain are provided along a circumference of said metal container. The assembly can comprise an inner container in which the source chemical is contained.
    Type: Grant
    Filed: June 28, 2002
    Date of Patent: May 10, 2005
    Assignee: ASM International, NV
    Inventors: Sven Lindfors, Jan von Zweygbergk, Marko J. Kukkonen
  • Source chemical container assembly
    Publication number: 20030075925
    Abstract: The invention relates to a source chemical container assembly, comprising a metal container functioning as a vacuum chamber and provided with a removable closure, which removable closure seals against the metal container with a metal seal. In order to facilitate easy recharging of the container assembly, compressive force is applied to the metal seal through a tension chain. In a preferred embodiment of the invention the metal seal and the tension chain are provided along a circumference of said metal container. The assembly can comprise an inner container in which the source chemical is contained.
    Type: Application
    Filed: June 28, 2002
    Publication date: April 24, 2003
    Inventors: Sven Lindfors, Jan von Zweygbergk, Marko J. Kukkonen