Patents by Inventor Marko Sokolich

Marko Sokolich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9117763
    Abstract: Semiconductor device identification using quantum dot technology. A semiconductor nanocrystal based target is fabricated. A guard ring superjacent the fluorescing surface of the nanocrystal surface is provided to ensure repeatability of spectral mapping and analysis data. A transparent cap on the target may enhance performance. A system for coding a semiconductor device is described. A method is described for fabricating quantum dot targets in a methodology compatible with subsequent semiconductor fabrication process steps.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: August 25, 2015
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Peter W. Deelman, Marko Sokolich
  • Patent number: 8957455
    Abstract: A heterojunction bipolar transistor (HBT) having an emitter, a base, and a collector, the base including a first semiconductor layer coupled to the collector, the first semiconductor layer having a first bandgap between a first conduction band and a first valence band and a second semiconductor layer coupled to the first semiconductor layer and having a second bandgap between a second conduction band and a second valence band, wherein the second valence band is higher than the first valence band and wherein the second semiconductor layer comprises a two dimensional hole gas and a third semiconductor layer coupled to the second semiconductor layer and having a third bandgap between a third conduction band and a third valence band, wherein the third valence band is lower than the second valence band and wherein the third semiconductor layer is coupled to the emitter.
    Type: Grant
    Filed: April 3, 2012
    Date of Patent: February 17, 2015
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
  • Patent number: 8697532
    Abstract: A wafer comprising at least one emitter-up Heterojunction Bipolar Transistor (HBT) and at least one emitter-down HBT on a common InP based semiconductor wafer. Isolation and N-type implants into the device layers differentiate an emitter-down HBT from an emitter-up HBT. The method for preparing a device comprises forming identical layers for all HBTs and performing ion implantation to differentiate an emitter-down HBT from an emitter-up HBT.
    Type: Grant
    Filed: November 11, 2009
    Date of Patent: April 15, 2014
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Chen, Marko Sokolich
  • Patent number: 8595654
    Abstract: Semiconductor device identification using quantum dot technology. A semiconductor nanocrystal based target is fabricated. A guard ring superjacent the fluorescing surface of the nanocrystal surface is provided to ensure repeatability of spectral mapping and analysis data. A transparent cap on the target may enhance performance. A system for coding a semiconductor device is described. A method is described for fabricating quantum dot targets in a methodology compatible with subsequent semiconductor fabrication process steps.
    Type: Grant
    Filed: October 3, 2006
    Date of Patent: November 26, 2013
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, Peter W. Deelman, Marko Sokolich
  • Patent number: 8216910
    Abstract: A wafer comprising at least one high Ft HBT and at least one high BVceo HBT having various collector profiles on a common III-V compound semiconductor based wafer. The N+ implant in the collector varies the collector profiles of individual HBTs on the wafer. The method for preparing the device comprises forming of HBT layers up to and including collector layer on non-silicon based substrate, performing ion implantation, annealing for implant activation, and forming remaining HBT layers.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: July 10, 2012
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Chen, Marko Sokolich
  • Patent number: 8178946
    Abstract: A heterojunction bipolar transistor (HBT) having an emitter, a base, and a collector, the base including a first semiconductor layer coupled to the collector, the first semiconductor layer having a first bandgap between a first conduction band and a first valence band and a second semiconductor layer coupled to the first semiconductor layer and having a second bandgap between a second conduction band and a second valence band, wherein the second valence band is higher than the first valence band and wherein the second semiconductor layer comprises a two dimensional hole gas and a third semiconductor layer coupled to the second semiconductor layer and having a third bandgap between a third conduction band and a third valence band, wherein the third valence band is lower than the second valence band and wherein the third semiconductor layer is coupled to the emitter.
    Type: Grant
    Filed: November 20, 2009
    Date of Patent: May 15, 2012
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
  • Patent number: 7868335
    Abstract: A bipolar junction transistor having an emitter, a base, and a collector includes a stack of one or more layer sets adjacent the collector. Each layer set includes a first material having a first band gap, wherein the first material is highly doped, and a second material having a second band gap narrower than the first band gap, wherein the second material is at most lightly doped.
    Type: Grant
    Filed: August 18, 2008
    Date of Patent: January 11, 2011
    Assignee: HRL Laboratories, LLC
    Inventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
  • Publication number: 20100059793
    Abstract: A wafer comprising at least one emitter-up Heterojunction Bipolar Transistor (HBT) and at least one emitter-down HBT on a common InP based semiconductor wafer. Isolation and N-type implants into the device layers differentiate an emitter-down HBT from an emitter-up HBT. The method for preparing a device comprises forming identical layers for all HBTs and performing ion implantation to differentiate an emitter-down HBT from an emitter-up HBT.
    Type: Application
    Filed: November 11, 2009
    Publication date: March 11, 2010
    Applicant: HRL LABORATORIES, LLC
    Inventors: Mary Chen, Marko Sokolich
  • Publication number: 20100047986
    Abstract: A wafer comprising at least one high Ft HBT and at least one high BVceo HBT having various collector profiles on a common III-V compound semiconductor based wafer. The N+ implant in the collector varies the collector profiles of individual HBTs on the wafer. The method for preparing the device comprises forming of HBT layers up to and including collector layer on non-silicon based substrate, performing ion implantation, annealing for implant activation, and forming remaining HBT layers.
    Type: Application
    Filed: June 4, 2009
    Publication date: February 25, 2010
    Applicant: HRL LABORATORIES, LLC
    Inventors: Mary CHEN, Marko Sokolich
  • Patent number: 7655529
    Abstract: A wafer comprising at least one emitter-up Heterojunction Bipolar Transistor (HBT) and at least one emitter-down HBT on a common InP based semiconductor wafer. Isolation and N-type implants into the device layers differentiate an emitter-down HBT from an emitter-up HBT. The method for preparing a device comprises forming identical layers for all HBTs and performing ion implantation to differentiate an emitter-down HBT from an emitter-up HBT.
    Type: Grant
    Filed: February 7, 2005
    Date of Patent: February 2, 2010
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Chen, Marko Sokolich
  • Patent number: 7582536
    Abstract: An electronic device contains a substrate, a sub-collector supported by the substrate, an un-doped layer having a selectively implanted buried sub-collector and supported by the sub-collector, an As-based nucleation layer partially supported by the un-doped layer, a collector layer supported by the As-based nucleation layer, a base layer supported by the collector layer, an emitter layer and a base contact supported by the base layer, an emitter cap layer supported by the emitter layer, an emitter contact supported by the emitter cap layer, and a collector contact supported by the sub-collector. A method provides for selecting a first InP layer, forming an As-based nucleation layer on the first InP layer, and epitaxially growing a second InP layer on the As-based nucleation layer.
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: September 1, 2009
    Assignee: HRL Laboratories, LLC
    Inventors: Rajesh D. Rajavel, Mary Y. Chen, Steven S. Bui, David H. Chow, James Chingwei Li, Mehran Mokhtari, Marko Sokolich
  • Patent number: 7576409
    Abstract: A wafer comprising at least one high Ft HBT and at least one high BVceo HBT having various collector profiles on a common III-V compound semiconductor based wafer. The N+ implant in the collector varies the collector profiles of individual HBTs on the wafer. The method for preparing the device comprises forming of HBT layers up to and including collector layer on non-silicon based substrate, performing ion implantation, annealing for implant activation, and forming remaining HBT layers.
    Type: Grant
    Filed: August 10, 2005
    Date of Patent: August 18, 2009
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Chen, Marko Sokolich
  • Patent number: 7531851
    Abstract: An electronic device contains a substrate, a sub-collector supported by the substrate, an un-doped layer having a selectively implanted buried sub-collector and supported by the sub-collector, an As-based nucleation layer partially supported by the un-doped layer, a collector layer supported by the As-based nucleation layer, a base layer supported by the collector layer, an emitter layer and a base contact supported by the base layer, an emitter cap layer supported by the emitter layer, an emitter contact supported by the emitter cap layer, and a collector contact supported by the sub-collector. A method provides for selecting a first InP layer, forming an As-based nucleation layer on the first InP layer, and epitaxially growing a second InP layer on the As-based nucleation layer.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: May 12, 2009
    Assignee: HRL Laboratories, LLC
    Inventors: Rajesh D. Rajavel, Mary Y. Chen, Steven S. Bui, David H. Chow, James Chingwei Li, Mehran Mokhtari, Marko Sokolich
  • Patent number: 7470619
    Abstract: Described is a method for forming a stackable interconnect. The interconnect is formed by depositing a first contact on a substrate; depositing a seed layer (SL) on the substrate; depositing a metal mask layer (MML) on the SL; depositing a bottom anti-reflection coating (BARC) on the MML; forming a photoresist layer (PR) on the BARC; removing a portion of the PR; etching the BARC and the MML to expose the SL; plating the exposed SL to form a first plated plug; removing the layers to expose the SL; removing an unplated portion of the SL; depositing an inter layer dielectric (ILD) on the interconnect; etching back the ILD to expose the first plated plug; and depositing a second contact on the first plated plug. Using the procedures described above, a second plated plug is then formed on the first plated plug to form the stackable plugged via interconnect.
    Type: Grant
    Filed: December 1, 2006
    Date of Patent: December 30, 2008
    Assignee: HRL Laboratories, LLC
    Inventors: Mary Y. Chen, James Chingwei Li, Philip H. Lawyer, Marko Sokolich
  • Patent number: 7176542
    Abstract: A photo-EMF detector including a shield to prevent a portion of the detector from illumination. The shield prevents the generation of unwanted noise-currents, thus increasing the performance of the photo-EMF detector.
    Type: Grant
    Filed: April 22, 2004
    Date of Patent: February 13, 2007
    Inventors: Gilmore J. Dunning, Marko Sokolich, Deborah Vogel, David M. Pepper
  • Publication number: 20050236686
    Abstract: A photo-EMF detector including a shield to prevent a portion of the detector from illumination. The shield prevents the generation of unwanted noise-currents, thus increasing the performance of the photo-EMF detector.
    Type: Application
    Filed: April 22, 2004
    Publication date: October 27, 2005
    Inventors: Gilmore Dunning, Marko Sokolich, Deborah Vogel, David Pepper
  • Patent number: 5502325
    Abstract: A magnetoresistor is monolithically integrated with an active circuit by growing a thin film magnetoresistor on a semiconductor substrate after the substrate has been doped and annealed for the active devices. The magnetoresistor is grown through a window in a mask, with the mask and magnetoresistor materials selected such that the magnetoresistor is substantially non-adherent to the mask. InSb is preferred for the magnetoresistor, Si.sub.3 N.sub.4 for the mask and GaAs for the substrate. The non-adherence allows the mask to be substantially thinner than the magnetoresistor without impairing the removal of the mask after the magnetoresistor has been established.
    Type: Grant
    Filed: May 30, 1995
    Date of Patent: March 26, 1996
    Assignee: Hughes Aircraft Company
    Inventors: Marko Sokolich, Hiroyuki Yamasaki, Huai-Tung Yang
  • Patent number: 5486804
    Abstract: A magnetoresistor is monolithically integrated with an active circuit by growing a thin film magnetoresistor on a semiconductor substrate after the substrate has been doped and annealed for the active devices. The magnetoresistor is grown through a window in a mask, with the mask and magnetoresistor materials selected such that the magnetoresistor is substantially non-adherent to the mask. InSb is preferred for the magnetoresistor, Si.sub.3 N.sub.4 for the mask and GaAs for the substrate. The non-adherence allows the mask to be substantially thinner than the magnetoresistor without impairing the removal of the mask after the magnetoresistor has been established.
    Type: Grant
    Filed: December 3, 1993
    Date of Patent: January 23, 1996
    Assignee: Hughes Aircraft Company
    Inventors: Marko Sokolich, Hiroyuki Yamasaki, Huai-Tung Yang
  • Patent number: 5471077
    Abstract: A high electron mobility transistor (HEMT) includes a diffusion barrier (22) to prevent gate metal (20) diffusion into the substrate (12) during fabrication and a sacrificial platinum alloy layer (30) forms the Schottky barrier. A method of forming a HEMT includes forming a diffusion barrier of titanium nitride on a platinum layer and applying sufficient heat to cause the platinum layer to alloy with the gallium arsenide layer forming a platinum gallium and platinum arsenide alloy layer and Schottky barrier. Since all platinum is consumed, this method permits precise control of the thickness of the gate layer and eliminates diffusion of the platinum gate layer into the gallium arsenide layer during later processing steps.
    Type: Grant
    Filed: October 10, 1991
    Date of Patent: November 28, 1995
    Assignee: Hughes Aircraft Company
    Inventor: Marko Sokolich
  • Patent number: 5181874
    Abstract: A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge spanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photo-resist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrtaed with the remainder of an integrated circuit.
    Type: Grant
    Filed: April 8, 1992
    Date of Patent: January 26, 1993
    Assignee: Hughes Aircraft Company
    Inventors: Marko Sokolich, Zaher Bardai