Patents by Inventor Marko Vehkamäki

Marko Vehkamäki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing bismuth-containing oxide films
    Patent number: 7618681
    Abstract: A process for producing bismuth-containing oxide thin films by Atomic Layer Deposition, including using an organic bismuth compound having at least one silylamido ligand as a source material for the bismuth oxide. Bismuth-containing oxide thin films produced by the preferred embodiments can be used, for example, as ferroelectric or dielectric material in integrated circuits and/or as superconductor materials.
    Type: Grant
    Filed: October 28, 2003
    Date of Patent: November 17, 2009
    Assignee: ASM International N.V.
    Inventors: Marko Vehkamäki, Timo Hatanpää, Mikko Ritala, Markku Leskelä
  • Method for growing oxide thin films containing barium and strontium
    Patent number: 7108747
    Abstract: The present invention relates to a method for growing oxide thin films which contain barium and/or strontium. According to the method, such thin films are made by the ALE technique by using as precursors for barium and strontium their cyclopentadienyl compounds. A thin film made by means of the invention has a high permittivity and excellent conformality.
    Type: Grant
    Filed: September 13, 1999
    Date of Patent: September 19, 2006
    Assignee: ASM International N.V.
    Inventors: Markku Leskelä, Mikko Ritala, Timo Hatanpää, Timo Hänninen, Marko Vehkamäki