Patents by Inventor Marko Walter

Marko Walter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microwave plasma generator with the short cross-sectional side of the resonator parallel to the chamber axis
    Patent number: 6198224
    Abstract: A device for the production of microwave plasmas with a microwave generator 1 and its coupling system to a waveguide resonator 5 which encloses a plasma chamber 7 is proposed, the short side of the cross-section of the resonator 5 lying parallel, facing the z axis, in the common wall with the chamber 7, and the microwave power being coupled from the resonator 5 into the chamber 7 via coupling points 6 in this short cross-sectional side. The coupling points are preferably formed as azimuthal slot couplers in the common wall of 5 and 7. The reference numbers relate to FIG. 1.
    Type: Grant
    Filed: February 1, 1999
    Date of Patent: March 6, 2001
    Inventors: Ralf Spitzl, Benedikt Aschermann, Marko Walter