Patents by Inventor Markus A. Zuegel

Markus A. Zuegel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of adjusting the edge angle in polysilicon
    Patent number: 4452881
    Abstract: The invention relates to a method of adjusting the edge angle of openings that are etched in a polysilicon layer.The steepness of the edge angles can be adjusted by means of a treatment of the polysilicon layer prior to the making of the photoresist mask with a mixture of 5 parts water and 1 to 3 parts ammonia and 0.25 to 1 part hydrogen peroxide. This pre-treatment is advantageously carried out at a temperature between 40.degree. and 70.degree. C.
    Type: Grant
    Filed: May 16, 1983
    Date of Patent: June 5, 1984
    Assignee: International Business Machines Corporation
    Inventors: Wolfgang Augstein, Peter Frasch, Blanka Ivancic, Markus A. Zuegel