Abstract: A system, apparatus and method for controlling operation of a vehicle. Driver assistance system (DAS) data may be used for controlling one or more function of the vehicle via a driver assistance system. Driver profile data (DPD) is generated and/or received that includes training data from sensor monitoring of a driver's usage characteristics for at least one feature of a vehicle type during a driver-controlled mode of vehicle driving. The DPD is processed with the DAS data to determine if the DPD conform to a tolerance parameter of the DAS data. A driver profile data file may be created by overwriting the portions of the DAS data with the DPD conforming to the tolerance parameters. One or more functions on the vehicle may be controlled via the driver profile data file using the driver assistance system during one of a semi-autonomous and fully autonomous mode of operation.

Abstract: A system, apparatus and method for controlling operation of a vehicle. Driver assistance system (DAS) data may be used for controlling one or more function of the vehicle via a driver assistance system. Driver profile data (DPD) is generated and/or received that includes training data from sensor monitoring of a driver's usage characteristics for at least one feature of a vehicle type during a driver-controlled mode of vehicle driving. The DPD is processed with the DAS data to determine if the DPD conform to one or more safety metrics. A driver profile data file may be created by weighing the portions of the DAS data with the DPD that do not conform with the safety metrics. One or more functions on the vehicle may be controlled via the driver profile data file using the driver assistance system during one of a semi-autonomous and fully autonomous mode of operation.

Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image. In one aspect, determining an optimum one of the combinations of the first apertures includes selecting a set of one or more individual apertures that result in the highest signal to noise ratio for the defect area, and the method includes setting the optimum combination of the first apertures on the inspection tool and inspecting a sample using such optimum combination of the first apertures.

Abstract: A system, apparatus and method for controlling operation of a vehicle. Driver assistance system (DAS) data may be used for controlling one or more function of the vehicle via a driver assistance system. Driver profile data (DPD) is generated and/or received that includes training data from sensor monitoring of a driver's usage characteristics for at least one feature of a vehicle type during a driver-controlled mode of vehicle driving. The DPD is processed with the DAS data to determine if the DPD conform to a tolerance parameter of the DAS data. A driver profile data file may be created by overwriting the portions of the DAS data with the DPD conforming to the tolerance parameters. One or more functions on the vehicle may be controlled via the driver profile data file using the driver assistance system during one of a semi-autonomous and fully autonomous mode of operation.

Abstract: A system, apparatus and method for controlling operation of a vehicle. Driver assistance system (DAS) data may be used for controlling one or more function of the vehicle via a driver assistance system. Driver profile data (DPD) is generated and/or received that includes training data from sensor monitoring of a driver's usage characteristics for at least one feature of a vehicle type during a driver-controlled mode of vehicle driving. The DPD is processed with the DAS data to determine if the DPD conform to one or more safety metrics. A driver profile data file may be created by weighing the portions of the DAS data with the DPD that do not conform with the safety metrics. One or more functions on the vehicle may be controlled via the driver profile data file using the driver assistance system during one of a semi-autonomous and fully autonomous mode of operation.

Abstract: Disclosed are methods and apparatus for detecting defects in a semiconductor sample. An inspection tool is used to collect intensity data sets at a plurality of focus settings from each of a plurality of xy positions of the sample. A polynomial equation having a plurality of coefficients is extracted for each of the xy position's collected intensity data sets as a function of focus setting. Each of the coefficients' set of values for the plurality of xy positions is represented with a corresponding coefficient image plane. A target set of coefficient image planes and a reference set of coefficient image planes are then analyzed to detect defects on the sample.

Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image. In one aspect, determining an optimum one of the combinations of the first apertures includes selecting a set of one or more individual apertures that result in the highest signal to noise ratio for the defect area, and the method includes setting the optimum combination of the first apertures on the inspection tool and inspecting a sample using such optimum combination of the first apertures.

Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image.

Abstract: Disclosed are methods and apparatus for detecting defects in a semiconductor sample. An inspection tool is used to collect intensity data sets at a plurality of focus settings from each of a plurality of xy positions of the sample. A polynomial equation having a plurality of coefficients is extracted for each of the xy position's collected intensity data sets as a function of focus setting. Each of the coefficients' set of values for the plurality of xy positions is represented with a corresponding coefficient image plane. A target set of coefficient image planes and a reference set of coefficient image planes are then analyzed to detect defects on the sample.

Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image.