Patents by Inventor Markus Boese

Markus Boese has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and devices for examining an electrically charged specimen surface
    Patent number: 11170970
    Abstract: A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: November 9, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Michael Schnell, Bernd Schindler, Markus Boese
  • METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN SURFACE
    Publication number: 20190035601
    Abstract: A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.
    Type: Application
    Filed: August 21, 2018
    Publication date: January 31, 2019
    Inventors: Michael Budach, Michael Schnell, Bernd Schindler, Markus Boese
  • Methods and devices for examining an electrically charged specimen surface
    Patent number: 10068747
    Abstract: A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: September 4, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Michael Schnell, Bernd Schindler, Markus Boese
  • METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN SURFACE
    Publication number: 20170062180
    Abstract: A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.
    Type: Application
    Filed: August 31, 2016
    Publication date: March 2, 2017
    Inventors: Michael Budach, Michael Schnell, Bernd Schindler, Markus Boese