Patents by Inventor Markus Dankelmann

Markus Dankelmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure mask, exposure apparatus and method for calibrating an exposure apparatus
    Patent number: 10331036
    Abstract: In various embodiments, an exposure mask may include a carrier, a first exposure structure in a first structure plane of the carrier, and a second exposure structure in a second structure plane of the carrier. The two structure planes differ from one another.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: June 25, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Heiko Assmann, Markus Dankelmann, Uwe Winkler
  • EXPOSURE MASK, EXPOSURE APPARATUS AND METHOD FOR CALIBRATING AN EXPOSURE APPARATUS
    Publication number: 20170336718
    Abstract: In various embodiments, an exposure mask may include a carrier, a first exposure structure in a first structure plane of the carrier, and a second exposure structure in a second structure plane of the carrier. The two structure planes differ from one another.
    Type: Application
    Filed: May 16, 2017
    Publication date: November 23, 2017
    Inventors: Heiko Assmann, Markus Dankelmann, Uwe Winkler