Patents by Inventor Markus Decker

Markus Decker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Test structures for estimating dishing and erosion effects in copper damascene technology
    Patent number: 7197726
    Abstract: A test structure combines a first structure (1010) for erosion evaluation with a second structure (1000) for extraction of defect size distributions. The first structure (1010) is a loop structure usable determine a resistance value that varies with metal height. The second structure is a NEST structure (1000). Loop lines of the loop structure (1010) are connected on both sides of the NEST structure (1000).
    Type: Grant
    Filed: September 27, 2002
    Date of Patent: March 27, 2007
    Assignee: PDF Solutions, Inc.
    Inventors: Dennis J. Ciplickas, Markus Decker, Christopher Hess, Brian E. Stine, Larg H. Weiland
  • Flexible element
    Patent number: 6905415
    Abstract: A flexible element, for example a flexible shaft, has a core (12) and a tubular sheathing (16) protecting the latter. Sleeve elements (20) surround the core and hold the tubular sheathing (16) between them. Different co-efficients of thermal expansion of the material for the tubular sheathing in comparison to the material of the core have previously led to undesirable distortions. To avoid these distortions in a structurally simple manner, at least one sleeve element (20) holds the tubular sheathing (16) with limited axial play (26). The play compensation between the sleeve element (20) and tubular sheathing (16) is particularly advantageous when the sleeve elements (20) are used for fixing the flexible elements (10).
    Type: Grant
    Filed: November 15, 2001
    Date of Patent: June 14, 2005
    Assignee: Siemens Aktiengesellschaft
    Inventors: Markus Decker, Stefan Pfeiffer, Lars Emmel
  • Test structures for estimating dishing and erosion effects in copper damascene technology
    Publication number: 20040232910
    Abstract: A test structure combines a first structure (1010) for erosion evaluation with a second structure (1000) for extraction of defect size distributions. The first structure (1010) is a loop structure usable determine a resistance value that varies with metal height. The second structure is a NEST structure (1000). Loop lines of the loop structure (1010) are connected on both sides of the NEST structure (1000).
    Type: Application
    Filed: July 16, 2004
    Publication date: November 25, 2004
    Inventors: Dennis J Ciplickas, Markus Decker, Christopher Hess, Brian E Stine, Larg H Weiland
  • Flexible element
    Publication number: 20020091001
    Abstract: A flexible element, for example a flexible shaft, has a core (12) and a tubular sheathing (16) protecting the latter. Sleeve elements (20) surround the core and hold the tubular sheathing (16) between them. Different coefficients of thermal expansion of the material for the tubular sheathing in comparison to the material of the core have previously led to undesirable distortions. In order to avoid said distortions in a structurally simple manner, it is proposed that at least one sleeve element (20) holds the tubular sheathing (16) with limited axial play (26). The play compensation between the sleeve element (20) and tubular sheathing (16) is particularly advantageous when the sleeve elements (20) are used for fixing the flexible element (10).
    Type: Application
    Filed: November 15, 2001
    Publication date: July 11, 2002
    Inventors: Markus Decker, Stefan Pfeiffer, Lars Emmel