Patents by Inventor Markus Eckinger
Markus Eckinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230102575Abstract: A sensor for parallel measurement of pressure and acceleration of a vehicle, including a substrate, a sensor element disposed on the substrate, a material being connected with the sensor element and being exposed to the environment of the sensor, wherein the material is configured to act as a seismic mass, and an electronic circuitry connected with the sensor element and including a first filter and a second filter, wherein the first and second filters have different filter characteristics so that an output of the first filter is representative for the pressure and an output of the second is representative for the acceleration.Type: ApplicationFiled: September 21, 2022Publication date: March 30, 2023Inventors: Daniel KÖHLER, Vlad BUICULESCU, Florian BRANDL, Dirk MEINHOLD, Erhard LANDGRAF, Rainer Markus SCHALLER, Markus ECKINGER
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Patent number: 11121126Abstract: An embodiment of a silicon controlled rectifier (SCR) includes a semiconductor body, an active device region, and a device isolation region configured to electrically insulate the active device region from neighboring active device regions. First SCR regions and a second SCR region of a first conductivity type are in the active device region. A first pn-junction or Schottky junction is formed at an interface between the first SCR regions and the second SCR region. A first plurality of the first SCR regions and sub-regions of the second SCR region are alternately arranged and directly adjoin one another. A second pn-junction is formed at an interface between the second SCR region and a third SCR region of a second conductivity type. A third pn-junction is formed at an interface between the third SCR region and a fourth SCR region of the first conductivity type.Type: GrantFiled: January 29, 2020Date of Patent: September 14, 2021Assignee: Infineon Technologies AGInventors: Christian Cornelius Russ, Markus Eckinger, Kai Esmark
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Publication number: 20210148776Abstract: A pressure sensor is provided. The pressure sensor includes a magnetic sensor element configured to generate a signal based on a magnetic field sensed by the magnetic sensor element; a microelectromechanical system (MEMS) structure including a membrane configured to move, depending on a pressure applied thereto, relative to the magnetic sensor element; and a field influencing element configured to modify the magnetic field based on a movement of the membrane, wherein the field influencing element is arranged on the membrane.Type: ApplicationFiled: January 27, 2021Publication date: May 20, 2021Applicant: Infineon Technologies AGInventors: Markus ECKINGER, Dirk HAMMERSCHMIDT, Florian BRANDL, Bernhard WINKLER
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Patent number: 10996125Abstract: A pressure sensor is provided. The pressure sensor includes at least two electrodes and an integrated circuit configured to sense a capacitance between the at least two electrodes. Further, the pressure sensor includes a Microelectromechanical System (MEMS) structure including a conductive or dielectric membrane configured to move, depending on the pressure, relative to the at least two electrodes.Type: GrantFiled: May 10, 2018Date of Patent: May 4, 2021Inventors: Markus Eckinger, Dirk Hammerschmidt, Florian Brandl, Bernhard Winkler
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Publication number: 20200243507Abstract: An embodiment of a silicon controlled rectifier (SCR) includes a semiconductor body, an active device region, and a device isolation region configured to electrically insulate the active device region from neighboring active device regions. First SCR regions and a second SCR region of a first conductivity type are in the active device region. A first pn-junction or Schottky junction is formed at an interface between the first SCR regions and the second SCR region. A first plurality of the first SCR regions and sub-regions of the second SCR region are alternately arranged and directly adjoin one another. A second pn-junction is formed at an interface between the second SCR region and a third SCR region of a second conductivity type. A third pn-junction is formed at an interface between the third SCR region and a fourth SCR region of the first conductivity type.Type: ApplicationFiled: January 29, 2020Publication date: July 30, 2020Inventors: Christian Cornelius Russ, Markus Eckinger, Kai Esmark
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Publication number: 20190025385Abstract: A chemically sensitive Hall device having a substrate; a chemically sensitive layer arranged on the substrate and configured to operably interact with atoms or molecules of a gaseous or liquid fluid; first electrodes connected to the chemically sensitive layer and configured to feed a sensor current through the chemically sensitive layer along a first direction; and second electrodes connected to the chemically sensitive layer and configured to tap a Hall voltage at the chemically sensitive layer along a second direction.Type: ApplicationFiled: September 25, 2018Publication date: January 24, 2019Inventors: Werner Breuer, Markus Eckinger
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Publication number: 20180335359Abstract: A pressure sensor is provided. The pressure sensor includes at least two electrodes and an integrated circuit configured to sense a capacitance between the at least two electrodes. Further, the pressure sensor includes a Microelectromechanical System (MEMS) structure including a conductive or dielectric membrane configured to move, depending on the pressure, relative to the at least two electrodes.Type: ApplicationFiled: May 10, 2018Publication date: November 22, 2018Applicant: Infineon Technologies AGInventors: Markus ECKINGER, Dirk HAMMERSCHMIDT, Florian BRANDL, Bernhard WINKLER
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Patent number: 10082484Abstract: A chemically sensitive Hall device is described herein. In accordance with one example of the present invention, a Hall device comprises a substrate and a chemically sensitive layer arranged on the substrate. The chemically sensitive layer is able to interact with atoms or molecules of a gaseous or liquid fluid. Force electrodes are connected to the chemically sensitive layer for feeding a sensor current through the chemically sensitive layer along a first direction. Sense electrodes are connected to the chemically sensitive layer to tap a Hall voltage at the chemically sensitive layer along a second direction. A back gate is arranged on or integrated in the substrate and is isolated from the chemically sensitive layer by an isolation layer.Type: GrantFiled: August 25, 2016Date of Patent: September 25, 2018Assignee: Infineon Technologies AGInventors: Werner Breuer, Markus Eckinger
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Patent number: 9978930Abstract: Methods for doping an active Hall effect region of a Hall effect device in a semiconductor substrate, and Hall effect devices having a doped active Hall effect region are provided. A method includes forming a first doping profile of a first doping type in a first depth region of the active Hall effect region by means of a first implantation with a first implantation energy level, forming a second doping profile of the first doping type in a second depth region of the active Hall effect region by means of a second implantation with a second implantation energy level, and forming an overall doping profile of the active Hall effect region by annealing the semiconductor substrate with the active Hall effect region having the first and the second doping profile.Type: GrantFiled: July 18, 2017Date of Patent: May 22, 2018Assignee: Infineon Technologies AGInventors: Markus Eckinger, Stefan Kolb
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Patent number: 9935259Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: GrantFiled: October 25, 2017Date of Patent: April 3, 2018Assignee: Infineon Technologies AGInventors: Stefan Kolb, Markus Eckinger
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Publication number: 20180047893Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: ApplicationFiled: October 25, 2017Publication date: February 15, 2018Inventors: Stefan Kolb, Markus Eckinger
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Patent number: 9818934Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: GrantFiled: November 11, 2016Date of Patent: November 14, 2017Assignee: Infineon Technologies AGInventors: Stefan Kolb, Markus Eckinger
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Publication number: 20170317271Abstract: Methods for doping an active Hall effect region of a Hall effect device in a semiconductor substrate, and Hall effect devices having a doped active Hall effect region are provided. A method includes forming a first doping profile of a first doping type in a first depth region of the active Hall effect region by means of a first implantation with a first implantation energy level, forming a second doping profile of the first doping type in a second depth region of the active Hall effect region by means of a second implantation with a second implantation energy level, and forming an overall doping profile of the active Hall effect region by annealing the semiconductor substrate with the active Hall effect region having the first and the second doping profile.Type: ApplicationFiled: July 18, 2017Publication date: November 2, 2017Applicant: Infineon Technologies AGInventors: Markus ECKINGER, Stefan KOLB
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Patent number: 9741925Abstract: Methods for doping an active Hall effect region of a Hall effect device in a semiconductor substrate, and Hall effect devices having a doped active Hall effect region are provided. A method includes forming a first doping profile of a first doping type in a first depth region of the active Hall effect region by means of a first implantation with a first implantation energy level, forming a second doping profile of the first doping type in a second depth region of the active Hall effect region by means of a second implantation with a second implantation energy level, and forming an overall doping profile of the active Hall effect region by annealing the semiconductor substrate with the active Hall effect region having the first and the second doping profile.Type: GrantFiled: March 14, 2016Date of Patent: August 22, 2017Assignee: INFINEON TECHNOLOGIES AGInventors: Markus Eckinger, Stefan Kolb
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Patent number: 9714988Abstract: A Hall Effect sensor with a graphene detection layer implemented in a variety of geometries, including the possibility of a so-called “full 3-d” Hall sensor, with the option for integration in a BiCMOS process and a method for producing said Hall Effect sensor is disclosed.Type: GrantFiled: October 15, 2014Date of Patent: July 25, 2017Assignee: INFINEON TECHNOLOGIES AGInventors: Markus Eckinger, Stefan Kolb, Alfons Dehe, Guenther Ruhl
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Publication number: 20170082581Abstract: A chemically sensitive Hall device is described herein. In accordance with one example of the present invention, a Hall device comprises a substrate and a chemically sensitive layer arranged on the substrate. The chemically sensitive layer is able to interact with atoms or molecules of a gaseous or liquid fluid. Force electrodes are connected to the chemically sensitive layer for feeding a sensor current through the chemically sensitive layer along a first direction. Sense electrodes are connected to the chemically sensitive layer to tap a Hall voltage at the chemically sensitive layer along a second direction. A back gate is arranged on or integrated in the substrate and is isolated from the chemically sensitive layer by an isolation layer.Type: ApplicationFiled: August 25, 2016Publication date: March 23, 2017Inventors: Werner Breuer, Markus Eckinger
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Publication number: 20170062704Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: ApplicationFiled: November 11, 2016Publication date: March 2, 2017Inventors: Stefan Kolb, Markus Eckinger
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Patent number: 9520551Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: GrantFiled: November 5, 2015Date of Patent: December 13, 2016Assignee: Infineon Tecnologies AGInventors: Stefan Kolb, Markus Eckinger
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Publication number: 20160268498Abstract: Methods for doping an active Hall effect region of a Hall effect device in a semiconductor substrate, and Hall effect devices having a doped active Hall effect region are provided. A method includes forming a first doping profile of a first doping type in a first depth region of the active Hall effect region by means of a first implantation with a first implantation energy level, forming a second doping profile of the first doping type in a second depth region of the active Hall effect region by means of a second implantation with a second implantation energy level, and forming an overall doping profile of the active Hall effect region by annealing the semiconductor substrate with the active Hall effect region having the first and the second doping profile.Type: ApplicationFiled: March 14, 2016Publication date: September 15, 2016Applicant: Infineon Technologies AGInventors: Markus ECKINGER, Stefan KOLB
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Publication number: 20160056369Abstract: A hall effect device includes an active Hall region in a semiconductor substrate, and at least four terminal structures, each terminal structure including a switchable supply contact element and a sense contact element, wherein each supply contact element includes a transistor element with a first transistor terminal, a second transistor terminal, and a control terminal, wherein the second transistor terminal contacts the active Hall region or extends in the active Hall region; and wherein the sense contact elements are arranged in the active Hall region and neighboring to the switchable supply contact elements.Type: ApplicationFiled: November 5, 2015Publication date: February 25, 2016Inventors: Stefan Kolb, Markus Eckinger