Patents by Inventor Markus Eibl
Markus Eibl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12604701Abstract: A modular wafer-chuck system is provided for mounting or clamping and temperature control of a wafer. The modular wafer-chuck system includes: a chuck for temperature control of a wafer; and a sensor module with at least one temperature-measuring apparatus for measuring a temperature of the sensor module and/or of the chuck and/or of a wafer mounted or clamped by the wafer-chuck system. The chuck has a coupling surface configured to detachably couple the sensor module, and the sensor module has a coupling surface configured to mount or clamp a wafer.Type: GrantFiled: December 17, 2021Date of Patent: April 14, 2026Assignee: ATT Advanced Temperature Test Systems GmbHInventor: Markus Eibl
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Publication number: 20240063037Abstract: A modular wafer-chuck system is provided for mounting or clamping and temperature control of a wafer. The modular wafer-chuck system includes: a chuck for temperature control of a wafer; and a sensor module with at least one temperature-measuring apparatus for measuring a temperature of the sensor module and/or of the chuck and/or of a wafer mounted or clamped by the wafer-chuck system. The chuck has a coupling surface configured to detachably couple the sensor module, and the sensor module has a coupling surface configured to mount or clamp a wafer.Type: ApplicationFiled: December 17, 2021Publication date: February 22, 2024Inventor: Markus Eibl
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Patent number: 11821941Abstract: A method for open-loop or closed-loop control of the temperature of a chuck for a wafer includes detecting the position of a test device for testing a wafer and determining the spatial distances between the test device and a plurality of temperature measurement devices for measuring the temperature of the chuck or of a wafer supported or clamped by the chuck. The method proceeds by selecting at least one temperature measurement device from the plurality of temperature measurement devices as a reference temperature measurement device; and controlling the temperature of the chuck by open-loop or closed-loop control on the basis of the temperature(s) of the chuck or wafer as measured by the selected one or more reference temperature measurement devices.Type: GrantFiled: July 21, 2020Date of Patent: November 21, 2023Assignee: ATT ADVANCED TEMPERATURE TEST SYSTEM GMBHInventor: Markus Eibl
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Publication number: 20230207346Abstract: A temperature-control device (1) is provided for controlling the temperature of a prober table (110) for semiconductor wafers and/or hybrids. The device has a fluid inlet (10) for introducing a temperature-control fluid into the temperature-control device (1) and a first heat exchanger (20) for preliminary control of the temperature of the temperature-control fluid that is introduced. A second heat exchanger (30) is used to control the temperature of the temperature-control fluid. The temperature-controlled temperature-control fluid can be conducted to the prober table (110) through a prober temperature-control line (40). A return circuit (60) is configured, so that upon receiving a return switch signal, the return circuit (60) selectively either conducts a temperature-control fluid returned from the prober table (110) through the first heat exchanger (20) or allows the temperature control fluid to flow out bypassing the first heat exchanger (20).Type: ApplicationFiled: April 21, 2021Publication date: June 29, 2023Inventors: Markus Eibl, Thomas Lippert, Ferdinand Wimmer
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Publication number: 20220334174Abstract: The present invention relates to a method for open-loop or closed-loop control of the temperature of a chuck for a wafer, comprising the steps of: detecting the position of a test means for testing a wafer; determining the spatial distances between the test means and a plurality of temperature measurement means for measuring the temperature of the chuck or of a wafer supported or clamped by the chuck; selecting at least one temperature measurement means from the plurality of temperature measurement means as a reference temperature measurement means; controlling the temperature of the chuck by means of open-loop or closed-loop control on the basis of the temperature(s) of the chuck or wafer as measured by the selected one or more reference temperature measurement means.Type: ApplicationFiled: July 21, 2020Publication date: October 20, 2022Inventor: Markus Eibl
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Patent number: 9202729Abstract: Device and method for regulating the temperature of a substrate, in particular of a wafer, by means of a device comprising two temperature-regulating circuits that are operated with different temperature-regulating fluids.Type: GrantFiled: October 17, 2006Date of Patent: December 1, 2015Assignee: ATT Systems GmbHInventor: Markus Eibl
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Publication number: 20110041862Abstract: A cigarette, in which the paper surrounding the tobacco column comprises discrete areas, in particular in the form of bands, which are loaded with the acetate of a polysaccharide and thus increase the self-extinction of the cigarette by reducing the access of air to the burning tobacco column, wherein the polysaccharide is a starch.Type: ApplicationFiled: February 10, 2009Publication date: February 24, 2011Inventors: Dietmar Volgger, Harald Giener, Markus eibl, Berndt Koll
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Publication number: 20090250202Abstract: Device and method for regulating the temperature of a substrate, in particular of a wafer, by means of a device comprising two temperature-regulating circuits that are operated with different temperature-regulating fluids.Type: ApplicationFiled: October 17, 2006Publication date: October 8, 2009Inventor: Markus Eibl
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Publication number: 20080302513Abstract: The invention concerns a device and a method for tempering a substrate (S), as well as a method for making such a device, which comprises the following elements: a first subelements (10) provided with a support surface (20) to be pressed against the substrate (S) and with a first connecting surface, a second subelement (12) provided with a second connecting surface (28) whereby it is pressed at least partly against the first connecting surface (10). At least one of the two subelements (10, 12) contains a ceramic material. At least one of the two connecting surfaces (22, 28) comprises at least one recess (24, 30) which defines at least one cavity (32) in the device. At least one first connecting opening enables a thermostatic liquid to be circulated and/or supplied towards and/or from the cavity (32).Type: ApplicationFiled: March 30, 2006Publication date: December 11, 2008Applicant: ATT Systems GmbHInventor: Markus Eibl
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Publication number: 20050077021Abstract: The invention relates to a method for producing paper imprinted with a pattern, especially cigarette paper that is impregnated stripwise with fire-retardant materials. According to said method, a self-supporting web of paper is imprinted with an aqueous printing solution. Said printing solution contains water-soluble polymers and the paper is heated to above 50° C. before or during printing.Type: ApplicationFiled: April 24, 2002Publication date: April 14, 2005Inventors: Ernst Brunbauer, Berndt Koll, Markus Eibl, Andreas Windischbauer
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Publication number: 20040221861Abstract: A cigarette with an increased self-extinguishing tendency, wherein the cigarette paper has annular zones whose porosity is reduced by the presence of a polymer, whose interfacial tension is over 33 mJ/m2.Type: ApplicationFiled: April 21, 2004Publication date: November 11, 2004Inventor: Markus Eibl
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Patent number: 6117378Abstract: A process for the production of cellulose fibers, comprising the following steps:(A) dissolving a cellulose-containing material in an aqueous, tertiary amine-oxide to obtain a spinnable cellulose solution;(B) spinning said cellulose solution and passing it through an aqueous precipitation bath, whereby water-containing, swollen filaments are obtained;(C) squeezing said water-containing, swollen filaments at various points, so that at least two squeezing points per millimeter of filament length on average are achieved and(D) drying said squeezed filaments to cellulose fibers, wherein squeezing is carried out using a pressure big enough so that said squeezing points produced on the filament are preserved also on the dried fibre and may be seen as color variations when observed under linearly polarized light.Type: GrantFiled: August 22, 1997Date of Patent: September 12, 2000Assignee: Lenzing AktiengesellschaftInventors: Markus Eibl, Dieter Eichinger
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Patent number: 6022378Abstract: A process for the treatment of cellulose fibers of the Lyocell type, wherein said fibers are contacted with a textile auxiliary agent, characterized in that as said textile auxiliary agent a compound of the general formula ##STR1## or its alkaline metal salt is employed, wherein X is halogen, alkoxy having 1-4 carbon atoms, amino, alkylamino having 1-4 carbon atoms, hydroxysulphonyl or 1-nicotinyl; Y having the general formula ##STR2## wherein n is the number 1 or 2; R.sup.1 is hydrogen, alkyl having 1-4 carbon atoms or phenyl; R.sup.2 and R.sup.3 are hydrogen, hydroxysulphonyl, hydroxyl, halogen, alkyl having 1-4 carbon atoms or carboxyl; A is vinyl or --C.sub.2 H.sub.4 B, wherein B is a group capable of being cleaved under alkaline conditions; and Z is Y or X.Type: GrantFiled: December 15, 1998Date of Patent: February 8, 2000Assignee: Lenzing AktiengesellschaftInventor: Markus Eibl
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Patent number: 5837184Abstract: Process for the production of cellulose fibres having a reduced tendency to fibrillation, in which a solution of cellulose in a tertiary amine-oxide is spun into fibres and the freshly spun fibres are contacted with a textile agent comprising at least two reactive groups, and are heat-treated, characterized in that the heat treatment is carried out by means of irradiation with electromagnetic waves.Type: GrantFiled: June 2, 1997Date of Patent: November 17, 1998Assignee: Lenzing AktiengesellschaftInventors: Heinrich Firgo, Markus Eibl, Johann Schickermuller
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Patent number: 5662858Abstract: Process for the production of cellulose fibres having a reduced tendency to fibrillation, in which a solution of cellulose in a tertiary amine-oxide is spun into fibres and the freshly spun fibres are contacted with a textile agent comprising at least two reactive groups, and are heat-treated, characterized in that the heat treatment is carried out by means of irradiation with electromagnetic waves.Type: GrantFiled: June 28, 1995Date of Patent: September 2, 1997Assignee: Lenzing AktiengesellschaftInventors: Heinrich Firgo, Markus Eibl, Johann Schickermuller
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Patent number: 5653931Abstract: The invention is concerned with a process for the production of cellulose moulded bodies, particularly films and fibres, by extruding a solution of cellulose in a tertiary amine-oxide through a shaping device, for example a spinneret, and conducting the extruded moulded body while drawing it into an aqueous precipitation bath, in which it coagulates, whereafter the coagulated moulded body is washed with an aqueous washing liquid, characterized in that the precipitation bath employed for coagulation and/or the washing liquid employed for washing contain(s) a surfactant in dissolved form.Type: GrantFiled: June 5, 1995Date of Patent: August 5, 1997Assignee: Lenzing AktiengesellschaftInventors: Markus Eibl, Heinrich Firgo
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Patent number: 5632256Abstract: In an internal combustion engine with an exhaust gas turbocharger which supplies compressed charge air to the engine via a charge air duct including an intercooler with a housing and a cooling structure for cooling the compressed charge air before it is supplied to the engine, the intercooler housing has an inlet area connected to the turbocharger by an upstream section of the charge air duct and an outlet area connected to the engine by a downstream section of the charge air duct and an air flow control mechanism which is arranged between the inlet and outlet areas and operable to be open during engine warm-up when the engine is below a predetermined temperature so that the charge air by-passes the cooling structure during engine warm-up.Type: GrantFiled: February 3, 1996Date of Patent: May 27, 1997Assignee: Mercedes-Benz AGInventor: Markus Eibl
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Patent number: 5601767Abstract: A process for the production of a cellulose moulded body, particularly cellulose fibres, characterized by the combination of the measures offeeding a cellulose-containing material into an aqueous solution of a tertiary amine-oxide in order to suspend said cellulose-containing material,removing water from the suspension while intensively mixing it and providing elevated temperature and reduced pressure, until a solution of cellulose is produced andmoulding said solution by means of a moulding device, particularly a spinneret, and introducing it into a precipitation bath in order to precipitate the dissolved cellulose,provided that as said cellulose-containing material, basically shredded waste paper, shredded cellulose-containing fibre assemblies and/or shredded, mechanically and/or chemically broken up annual plants are used.Type: GrantFiled: June 6, 1995Date of Patent: February 11, 1997Assignee: Lenzing AktiengesellschaftInventors: Heinrich Firgo, Dieter Eichinger, Markus Eibl
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Patent number: 5543101Abstract: Disclosed is a process for producing cellulose fibers having a decreased tendency to fibrillate. The process comprises the steps of extruding a solution of cellulose in a tertiary amine-oxide through spinning holes of a spinneret to form cellulose filaments, conducting the extruded cellulose filaments across an air gap of greater than 30 mm, and introducing the cellulose filaments into a precipitation bath. The process is carried out in a way that the mathematical expression 51.4+0.033.times.D+1937.times.M.sup.2 -7.18.times.T-0.094.times.L-2.50.times.F+0.045.times.F.sup.2, does not exceed the number 10. In the mathematical expression, D is the spinning hole diameter in .mu.m, M is the dope output per hole in g/min, T is the titer of the individual filament in dtex, L is the length of the air gap in mm and F is the humidity of the air in the air gap in g of water/kg of air.Type: GrantFiled: January 4, 1995Date of Patent: August 6, 1996Assignee: Lenzing AktiengesellschaftInventors: Hartmut Ruf, Markus Eibl, Raimund Jurkovic