Patents by Inventor Markus Eibl

Markus Eibl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12604701
    Abstract: A modular wafer-chuck system is provided for mounting or clamping and temperature control of a wafer. The modular wafer-chuck system includes: a chuck for temperature control of a wafer; and a sensor module with at least one temperature-measuring apparatus for measuring a temperature of the sensor module and/or of the chuck and/or of a wafer mounted or clamped by the wafer-chuck system. The chuck has a coupling surface configured to detachably couple the sensor module, and the sensor module has a coupling surface configured to mount or clamp a wafer.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 14, 2026
    Assignee: ATT Advanced Temperature Test Systems GmbH
    Inventor: Markus Eibl
  • Publication number: 20240063037
    Abstract: A modular wafer-chuck system is provided for mounting or clamping and temperature control of a wafer. The modular wafer-chuck system includes: a chuck for temperature control of a wafer; and a sensor module with at least one temperature-measuring apparatus for measuring a temperature of the sensor module and/or of the chuck and/or of a wafer mounted or clamped by the wafer-chuck system. The chuck has a coupling surface configured to detachably couple the sensor module, and the sensor module has a coupling surface configured to mount or clamp a wafer.
    Type: Application
    Filed: December 17, 2021
    Publication date: February 22, 2024
    Inventor: Markus Eibl
  • Patent number: 11821941
    Abstract: A method for open-loop or closed-loop control of the temperature of a chuck for a wafer includes detecting the position of a test device for testing a wafer and determining the spatial distances between the test device and a plurality of temperature measurement devices for measuring the temperature of the chuck or of a wafer supported or clamped by the chuck. The method proceeds by selecting at least one temperature measurement device from the plurality of temperature measurement devices as a reference temperature measurement device; and controlling the temperature of the chuck by open-loop or closed-loop control on the basis of the temperature(s) of the chuck or wafer as measured by the selected one or more reference temperature measurement devices.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: November 21, 2023
    Assignee: ATT ADVANCED TEMPERATURE TEST SYSTEM GMBH
    Inventor: Markus Eibl
  • Publication number: 20230207346
    Abstract: A temperature-control device (1) is provided for controlling the temperature of a prober table (110) for semiconductor wafers and/or hybrids. The device has a fluid inlet (10) for introducing a temperature-control fluid into the temperature-control device (1) and a first heat exchanger (20) for preliminary control of the temperature of the temperature-control fluid that is introduced. A second heat exchanger (30) is used to control the temperature of the temperature-control fluid. The temperature-controlled temperature-control fluid can be conducted to the prober table (110) through a prober temperature-control line (40). A return circuit (60) is configured, so that upon receiving a return switch signal, the return circuit (60) selectively either conducts a temperature-control fluid returned from the prober table (110) through the first heat exchanger (20) or allows the temperature control fluid to flow out bypassing the first heat exchanger (20).
    Type: Application
    Filed: April 21, 2021
    Publication date: June 29, 2023
    Inventors: Markus Eibl, Thomas Lippert, Ferdinand Wimmer
  • Publication number: 20220334174
    Abstract: The present invention relates to a method for open-loop or closed-loop control of the temperature of a chuck for a wafer, comprising the steps of: detecting the position of a test means for testing a wafer; determining the spatial distances between the test means and a plurality of temperature measurement means for measuring the temperature of the chuck or of a wafer supported or clamped by the chuck; selecting at least one temperature measurement means from the plurality of temperature measurement means as a reference temperature measurement means; controlling the temperature of the chuck by means of open-loop or closed-loop control on the basis of the temperature(s) of the chuck or wafer as measured by the selected one or more reference temperature measurement means.
    Type: Application
    Filed: July 21, 2020
    Publication date: October 20, 2022
    Inventor: Markus Eibl
  • Patent number: 9202729
    Abstract: Device and method for regulating the temperature of a substrate, in particular of a wafer, by means of a device comprising two temperature-regulating circuits that are operated with different temperature-regulating fluids.
    Type: Grant
    Filed: October 17, 2006
    Date of Patent: December 1, 2015
    Assignee: ATT Systems GmbH
    Inventor: Markus Eibl
  • Publication number: 20110041862
    Abstract: A cigarette, in which the paper surrounding the tobacco column comprises discrete areas, in particular in the form of bands, which are loaded with the acetate of a polysaccharide and thus increase the self-extinction of the cigarette by reducing the access of air to the burning tobacco column, wherein the polysaccharide is a starch.
    Type: Application
    Filed: February 10, 2009
    Publication date: February 24, 2011
    Inventors: Dietmar Volgger, Harald Giener, Markus eibl, Berndt Koll
  • Publication number: 20090250202
    Abstract: Device and method for regulating the temperature of a substrate, in particular of a wafer, by means of a device comprising two temperature-regulating circuits that are operated with different temperature-regulating fluids.
    Type: Application
    Filed: October 17, 2006
    Publication date: October 8, 2009
    Inventor: Markus Eibl
  • Publication number: 20080302513
    Abstract: The invention concerns a device and a method for tempering a substrate (S), as well as a method for making such a device, which comprises the following elements: a first subelements (10) provided with a support surface (20) to be pressed against the substrate (S) and with a first connecting surface, a second subelement (12) provided with a second connecting surface (28) whereby it is pressed at least partly against the first connecting surface (10). At least one of the two subelements (10, 12) contains a ceramic material. At least one of the two connecting surfaces (22, 28) comprises at least one recess (24, 30) which defines at least one cavity (32) in the device. At least one first connecting opening enables a thermostatic liquid to be circulated and/or supplied towards and/or from the cavity (32).
    Type: Application
    Filed: March 30, 2006
    Publication date: December 11, 2008
    Applicant: ATT Systems GmbH
    Inventor: Markus Eibl
  • Publication number: 20050077021
    Abstract: The invention relates to a method for producing paper imprinted with a pattern, especially cigarette paper that is impregnated stripwise with fire-retardant materials. According to said method, a self-supporting web of paper is imprinted with an aqueous printing solution. Said printing solution contains water-soluble polymers and the paper is heated to above 50° C. before or during printing.
    Type: Application
    Filed: April 24, 2002
    Publication date: April 14, 2005
    Inventors: Ernst Brunbauer, Berndt Koll, Markus Eibl, Andreas Windischbauer
  • Publication number: 20040221861
    Abstract: A cigarette with an increased self-extinguishing tendency, wherein the cigarette paper has annular zones whose porosity is reduced by the presence of a polymer, whose interfacial tension is over 33 mJ/m2.
    Type: Application
    Filed: April 21, 2004
    Publication date: November 11, 2004
    Inventor: Markus Eibl
  • Patent number: 6117378
    Abstract: A process for the production of cellulose fibers, comprising the following steps:(A) dissolving a cellulose-containing material in an aqueous, tertiary amine-oxide to obtain a spinnable cellulose solution;(B) spinning said cellulose solution and passing it through an aqueous precipitation bath, whereby water-containing, swollen filaments are obtained;(C) squeezing said water-containing, swollen filaments at various points, so that at least two squeezing points per millimeter of filament length on average are achieved and(D) drying said squeezed filaments to cellulose fibers, wherein squeezing is carried out using a pressure big enough so that said squeezing points produced on the filament are preserved also on the dried fibre and may be seen as color variations when observed under linearly polarized light.
    Type: Grant
    Filed: August 22, 1997
    Date of Patent: September 12, 2000
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Markus Eibl, Dieter Eichinger
  • Patent number: 6022378
    Abstract: A process for the treatment of cellulose fibers of the Lyocell type, wherein said fibers are contacted with a textile auxiliary agent, characterized in that as said textile auxiliary agent a compound of the general formula ##STR1## or its alkaline metal salt is employed, wherein X is halogen, alkoxy having 1-4 carbon atoms, amino, alkylamino having 1-4 carbon atoms, hydroxysulphonyl or 1-nicotinyl; Y having the general formula ##STR2## wherein n is the number 1 or 2; R.sup.1 is hydrogen, alkyl having 1-4 carbon atoms or phenyl; R.sup.2 and R.sup.3 are hydrogen, hydroxysulphonyl, hydroxyl, halogen, alkyl having 1-4 carbon atoms or carboxyl; A is vinyl or --C.sub.2 H.sub.4 B, wherein B is a group capable of being cleaved under alkaline conditions; and Z is Y or X.
    Type: Grant
    Filed: December 15, 1998
    Date of Patent: February 8, 2000
    Assignee: Lenzing Aktiengesellschaft
    Inventor: Markus Eibl
  • Patent number: 5837184
    Abstract: Process for the production of cellulose fibres having a reduced tendency to fibrillation, in which a solution of cellulose in a tertiary amine-oxide is spun into fibres and the freshly spun fibres are contacted with a textile agent comprising at least two reactive groups, and are heat-treated, characterized in that the heat treatment is carried out by means of irradiation with electromagnetic waves.
    Type: Grant
    Filed: June 2, 1997
    Date of Patent: November 17, 1998
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Heinrich Firgo, Markus Eibl, Johann Schickermuller
  • Patent number: 5662858
    Abstract: Process for the production of cellulose fibres having a reduced tendency to fibrillation, in which a solution of cellulose in a tertiary amine-oxide is spun into fibres and the freshly spun fibres are contacted with a textile agent comprising at least two reactive groups, and are heat-treated, characterized in that the heat treatment is carried out by means of irradiation with electromagnetic waves.
    Type: Grant
    Filed: June 28, 1995
    Date of Patent: September 2, 1997
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Heinrich Firgo, Markus Eibl, Johann Schickermuller
  • Patent number: 5653931
    Abstract: The invention is concerned with a process for the production of cellulose moulded bodies, particularly films and fibres, by extruding a solution of cellulose in a tertiary amine-oxide through a shaping device, for example a spinneret, and conducting the extruded moulded body while drawing it into an aqueous precipitation bath, in which it coagulates, whereafter the coagulated moulded body is washed with an aqueous washing liquid, characterized in that the precipitation bath employed for coagulation and/or the washing liquid employed for washing contain(s) a surfactant in dissolved form.
    Type: Grant
    Filed: June 5, 1995
    Date of Patent: August 5, 1997
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Markus Eibl, Heinrich Firgo
  • Patent number: 5632256
    Abstract: In an internal combustion engine with an exhaust gas turbocharger which supplies compressed charge air to the engine via a charge air duct including an intercooler with a housing and a cooling structure for cooling the compressed charge air before it is supplied to the engine, the intercooler housing has an inlet area connected to the turbocharger by an upstream section of the charge air duct and an outlet area connected to the engine by a downstream section of the charge air duct and an air flow control mechanism which is arranged between the inlet and outlet areas and operable to be open during engine warm-up when the engine is below a predetermined temperature so that the charge air by-passes the cooling structure during engine warm-up.
    Type: Grant
    Filed: February 3, 1996
    Date of Patent: May 27, 1997
    Assignee: Mercedes-Benz AG
    Inventor: Markus Eibl
  • Patent number: 5601767
    Abstract: A process for the production of a cellulose moulded body, particularly cellulose fibres, characterized by the combination of the measures offeeding a cellulose-containing material into an aqueous solution of a tertiary amine-oxide in order to suspend said cellulose-containing material,removing water from the suspension while intensively mixing it and providing elevated temperature and reduced pressure, until a solution of cellulose is produced andmoulding said solution by means of a moulding device, particularly a spinneret, and introducing it into a precipitation bath in order to precipitate the dissolved cellulose,provided that as said cellulose-containing material, basically shredded waste paper, shredded cellulose-containing fibre assemblies and/or shredded, mechanically and/or chemically broken up annual plants are used.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: February 11, 1997
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Heinrich Firgo, Dieter Eichinger, Markus Eibl
  • Patent number: 5543101
    Abstract: Disclosed is a process for producing cellulose fibers having a decreased tendency to fibrillate. The process comprises the steps of extruding a solution of cellulose in a tertiary amine-oxide through spinning holes of a spinneret to form cellulose filaments, conducting the extruded cellulose filaments across an air gap of greater than 30 mm, and introducing the cellulose filaments into a precipitation bath. The process is carried out in a way that the mathematical expression 51.4+0.033.times.D+1937.times.M.sup.2 -7.18.times.T-0.094.times.L-2.50.times.F+0.045.times.F.sup.2, does not exceed the number 10. In the mathematical expression, D is the spinning hole diameter in .mu.m, M is the dope output per hole in g/min, T is the titer of the individual filament in dtex, L is the length of the air gap in mm and F is the humidity of the air in the air gap in g of water/kg of air.
    Type: Grant
    Filed: January 4, 1995
    Date of Patent: August 6, 1996
    Assignee: Lenzing Aktiengesellschaft
    Inventors: Hartmut Ruf, Markus Eibl, Raimund Jurkovic