Patents by Inventor Markus Gacher

Markus Gacher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for liquid treatment of wafer-shaped articles
    Patent number: 8029641
    Abstract: Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W1, a second surface plane W2 and an edge surface. The device includes a support for holding the wafer-shaped article; liquid dispensing members for dispensing liquid onto the first surface plane W1 of the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of the liquid around the edge surface of the wafer-shaped article towards the second surface plane W2 of the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein the liquid guiding member has the form of a ring.
    Type: Grant
    Filed: May 18, 2006
    Date of Patent: October 4, 2011
    Assignee: Lam Research AG
    Inventors: Andreas Baldy, Markus Gacher, Michael Brugger