Patents by Inventor Markus I. Flik

Markus I. Flik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Non-contact temperature measurement of a film growing on a substrate
    Patent number: 5377126
    Abstract: Apparatus and method for non-contact temperature measurement of a film growing on a substrate which accounts for the change in emissivity due to the change in film thickness. The system employs an adaptively calibrated pyrometer wherein the substrate emittance is continuously computed so that the temperature measurement is accurate regardless of the emittance variation. The new system is easily constructed by adding data processing system software and hardware to conventional pyrometers.
    Type: Grant
    Filed: September 13, 1991
    Date of Patent: December 27, 1994
    Assignee: Massachusetts Institute of Technology
    Inventors: Markus I. Flik, Alfredo Anderson, Byungin Choi
  • Superconducting detector and method of making same
    Patent number: 5264375
    Abstract: A detector useful for detecting infrared (IR) radiation is described which is formed of an epitaxial film of superconductive material having a high transition temperature Tc. Specifically, an oxide of yttrium barium and copper is preferred for the high Tc material. The sensor is formed on a single crystalline silicon body suspended by a silicon nitride membrane over a gap formed in a silicon base body and thermally isolated thereby.
    Type: Grant
    Filed: April 15, 1992
    Date of Patent: November 23, 1993
    Assignee: Massachusetts Institute of Technology
    Inventors: Christopher A. Bang, Markus I. Flik, Martin A. Schmidt, Zhoumin Zhang