Patents by Inventor Markus K. Tilsch
Markus K. Tilsch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11692263Abstract: A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.Type: GrantFiled: September 28, 2018Date of Patent: July 4, 2023Assignee: VIAVI Solutions Inc.Inventors: Zhao Yuan, Markus K. Tilsch, Georg J. Ockenfuss, Marius Grigonis, Andrew Clark, Donggong Peng, Yinxiang Xia, Eric Nybank, Neil Pinkerton
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Patent number: 11542596Abstract: A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.Type: GrantFiled: July 1, 2019Date of Patent: January 3, 2023Assignee: VIAVI Solutions Inc.Inventors: Markus K. Tilsch, Benjamin F. Catching
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Patent number: 11486042Abstract: A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.Type: GrantFiled: January 17, 2019Date of Patent: November 1, 2022Assignee: VIAVI SOLUTIONS INC.Inventors: Adam Andrew Preuss, Richard A. Bradley, Jr., Georg J. Ockenfuss, Markus K. Tilsch, Andrew Clark, Marius Grigonis, Andy Shkabko, Nicolas Alexander Davis, Anthony Jay Kemp Cottrell
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Publication number: 20210332474Abstract: A device may include one or more memories and one or more processors, communicatively coupled to the one or more memories, to receive design information, wherein the design information identifies desired values for a set of layers of an optical element to be generated during one or more runs; receive or obtain historic information identifying a relationship between a parameter for the one or more runs and an observed value relating to the one or more runs or the optical element; determine layer information for the one or more runs based on the historic information, wherein the layer information identifies run parameters, for the set of layers, to achieve the desired values; and cause the one or more runs to be performed based on the layer information.Type: ApplicationFiled: September 28, 2018Publication date: October 28, 2021Inventors: Zhao YUAN, Markus K. TILSCH, Georg J. OCKENFUSS, Marius GRIGONIS, Andrew CLARK, Donggong PENG, Yinxiang XIA, Eric NYBANK, Neil PINKERTON
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Publication number: 20210002756Abstract: A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.Type: ApplicationFiled: July 1, 2019Publication date: January 7, 2021Inventors: Markus K. TILSCH, Benjamin F. CATCHING
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Publication number: 20190218669Abstract: A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.Type: ApplicationFiled: January 17, 2019Publication date: July 18, 2019Applicant: VIAVI SOLUTIONS INC.Inventors: Adam Andrew PREUSS, Richard A. BRADLEY, JR., Georg J. OCKENFUSS, Markus K. TILSCH, Andrew CLARK, Marius GRIGONIS, Andy SHKABKO, Nicolas Alexander DAVIS, Anthony Jay Kemp COTTRELL
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Patent number: 8864958Abstract: A method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index are provided. The sputter-deposition system includes a plurality of target cathodes, each of which comprises a target material having a different composition, that are powered by a single DC power supply. The plurality of target cathodes are cosputtered to deposit a layer composed of a mixture of materials on a substrate. The composite refractive index of the layer is controlled by adjusting an operating parameter of the plurality of target cathodes. Suitable operating parameters include cathode power, cathode voltage, cathode current, an angle between a cathode support and the substrate, and a flow rate of a reactive gas.Type: GrantFiled: March 4, 2008Date of Patent: October 21, 2014Assignee: JDS Uniphase CorporationInventors: Markus K. Tilsch, Joseph Smith, Marius Grigonis
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Patent number: 8658001Abstract: A method and control system are provided for depositing a layer in a sputter-deposition system having a target cathode. A first dependence relationship of a deposition rate of the layer on an operating parameter, selected from cathode voltage, cathode current, and cathode power, is provided prior to deposition of the layer. A second dependence relationship of the operating parameter on time is measured during deposition of the layer, while a different operating parameter, also selected from cathode voltage, cathode current, and cathode power, is held substantially constant. On the basis of the first and second dependence relationships, a deposition time for the layer is dynamically determined during deposition of the layer.Type: GrantFiled: March 10, 2008Date of Patent: February 25, 2014Assignee: JDS Uniphase CorporationInventors: Georg J. Ockenfuss, Markus K. Tilsch
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Patent number: 8163144Abstract: The present invention relates to a magnetron sputtering device and technique for depositing materials onto a substrate at a high production rate in which the deposited films have predictive thickness distribution and in which the apparatus can operate continuously and repeatedly for very long periods. The present invention has realized increased production by reducing cycle time. Increased coating rates are achieved by coupling a planetary drive system with a large cathode. The cathode diameter is greater than the diameter of a planet and less than twice the diameter of the planet. Lower defect rates are obtained through the lower power density at the cathode which suppresses arcing, while runoff is minimized by the cathode to planet geometry without the use of a mask.Type: GrantFiled: August 17, 2005Date of Patent: April 24, 2012Inventors: Markus K. Tilsch, Richard I. Seddon, Georg J. Ockenfuss, Jeremy Hayes, Robert E. Klinger
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Patent number: 7954219Abstract: A device for mounting and removing a substrate from a baseplate, in particular a substrate holder assembly device, including automated features for latching and unlatching a substrate, for use in a coating mechanism, from a baseplate, which includes an adjustable snap ring holder.Type: GrantFiled: September 7, 2007Date of Patent: June 7, 2011Assignee: JDS Uniphase CorporationInventors: Richard I. Seddon, Russell Edward Barbaria, Ralf Erz, Markus K. Tilsch
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Patent number: 7879209Abstract: A magnetron sputtering cathode for use in a vacuum deposition process is disclosed wherein the cathode is coated on its sides with an electrically insulating material such as alumina to prevent arcing, and wherein the first end surface of the cathode supports a material to be sputtered. The bottom of the cathode may also be coated with an electrically insulating coating or may be resting upon an insulating platform.Type: GrantFiled: July 8, 2005Date of Patent: February 1, 2011Assignee: JDS Uniphase CorporationInventors: Markus K. Tilsch, Georg J. Ockenfuss, Richard I. Seddon, Robert E. Hahn
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Patent number: 7785456Abstract: The invention relates to a magnetic latch for securing substrates on a planetary rotating platform suspended above a coating source in a vacuum chamber of a vapor deposition system, e.g. a chemical vapor deposition (CVD) system or a physical vapor deposition (PVD) system. The magnetic latch includes a permanent magnetic, which is moveable between a latching position, in which the permanent magnet magnetizes the latch for attracting a substrate holder, and an unlatching position, in which the permanent magnet is connected in a bypass circuit, thereby demagnetizing the latch for releasing the substrate holder.Type: GrantFiled: October 19, 2004Date of Patent: August 31, 2010Assignee: JDS Uniphase CorporationInventors: Richard I. Seddon, Markus K. Tilsch, Jeremy Hayes
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Publication number: 20090250341Abstract: A sputtering anode is disclosed wherein the anode is in the form of a container or vessel; and, wherein the conducting surface communicating with a cathode is the inside surface of the container or vessel. The anode can be mounted outside of a coating chamber having its opening communicating with the chamber or alternatively may be mounted within the chamber. The anode may be an inlet port for receiving inert gas for use in forming the plasma and for pressurizing the anode.Type: ApplicationFiled: March 11, 2009Publication date: October 8, 2009Inventors: Georg J. Ockenfuss, Markus K. Tilsch, Richard I. Seddon, Robert E. Hahn
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Publication number: 20080223716Abstract: A method and control system are provided for depositing a layer in a sputter-deposition system having a target cathode. A first dependence relationship of a deposition rate of the layer on an operating parameter, selected from cathode voltage, cathode current, and cathode power, is provided prior to deposition of the layer. A second dependence relationship of the operating parameter on time is measured during deposition of the layer, while a different operating parameter, also selected from cathode voltage, cathode current, and cathode power, is held substantially constant. On the basis of the first and second dependence relationships, a deposition time for the layer is dynamically determined during deposition of the layer.Type: ApplicationFiled: March 10, 2008Publication date: September 18, 2008Applicant: JDS Uniphase CorporationInventors: Georg J. Ockenfuss, Markus K. Tilsch
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Publication number: 20080223714Abstract: A method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index are provided. The sputter-deposition system includes a plurality of target cathodes, each of which comprises a target material having a different composition, that are powered by a single DC power supply. The plurality of target cathodes are cosputtered to deposit a layer composed of a mixture of materials on a substrate. The composite refractive index of the layer is controlled by adjusting an operating parameter of the plurality of target cathodes. Suitable operating parameters include cathode power, cathode voltage, cathode current, an angle between a cathode support and the substrate, and a flow rate of a reactive gas.Type: ApplicationFiled: March 4, 2008Publication date: September 18, 2008Applicant: JDS Uniphase CorporationInventors: Markus K. Tilsch, Joseph Smith, Marius Grigonis
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Patent number: 7062122Abstract: A wavelength-tunable add/drop device for adding or dropping n channels having different center wavelengths is disclosed. A first multicavity variable optical filter for selectably operable to passing one channel while reflecting n?1 other channels depends upon a location where light is launched into an end of the multicavity optical filter. A broadband optical reflector is disposed directly adjacent to the multicavity variable optical filter and disposed between planes coincident with the first and second surfaces of the variable filter, the broadband reflector having a reflectivity that will reflect all n channels of light. Preferably, the broadband reflector is disposed distal from the bottom and top layers of the multicavity filter and is adjacent to the middle layers or near the middle of the multicavity filter layers.Type: GrantFiled: November 3, 2003Date of Patent: June 13, 2006Assignee: JDS Uniphase CorporationInventors: Adam Bergeron, Robert E. Klinger, Georg J. Ockenfuss, Markus K. Tilsch, Frederik Kevin Zernik
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Publication number: 20040096148Abstract: A wavelength-tunable add/drop device for adding or dropping n channels having different center wavelengths is disclosed. A first multicavity variable optical filter for selectably operable to passing one channel while reflecting n−1 other channels depends upon a location where light is launched into an end of the multicavity optical filter. A broadband optical reflector is disposed directly adjacent to the multicavity variable optical filter and disposed between planes coincident with the first and second surfaces of the variable filter, the broadband reflector having a reflectivity that will reflect all n channels of light. Preferably, the broadband reflector is disposed distal from the bottom and top layers of the multicavity filter and is adjacent to the middle layers or near the middle of the multicavity filter layers.Type: ApplicationFiled: November 3, 2003Publication date: May 20, 2004Applicant: JDS Uniphase CorporationInventors: Adam Bergeron, Robert E. Klinger, Georg J. Ockenfuss, Markus K. Tilsch, Frederik Kevin Zernik