Abstract: An EUV collector for an EUV projection exposure apparatus transfers usable EUV light emerging from a source volume into a collection volume separated from the source volume. The source volume has a first source extension along a connection axis between a center of the source volume and a center of the collection volume. The source volume has a second, cross section source extension along a cross section axis perpendicular to the connection axis. The EUV collector images the source volume into the collection volume. The imaging has a first imaging scale along the connection axis and a second imaging scale along the cross section axis. The first imaging scale differs from the second imaging scale by at least 10%.

Abstract: A CO2 beam source includes a discharge tube in which a laser gas serves as a laser medium, a fan for supplying the laser gas into the discharge tube via a supply element and for removing the laser gas from the discharge tube via a removal element in a closed laser gas circuit, and a catalyst for catalysing oxidation of dissociation products formed upon excitation of the laser gas. The catalyst includes precious metal nanoparticles applied to a substrate. The catalyst is arranged with clearance from the discharge tube in the flow direction of the laser gas within the closed laser gas circuit in order to reduce deposition of degradation products formed in the discharge tube upon excitation of the laser gas compared to an arrangement within the discharge tube. A temperature of the at least one catalyst during operation of the CO2 beam source is at least 60° C.

Abstract: A security or identification device comprises a membrane laser structure configured to be optically pumped. The membrane laser structure comprises a flexible emission layer comprising a gain material; and one or more structures formed in or associated with the flexible emission layer and configured to provide optical feedback in the emission layer to produce a laser light output having at least one property representing an identifier.

Abstract: A security or identification device comprises a membrane laser structure configured to be optically pumped. The membrane laser structure comprises a flexible emission layer comprising a gain material; and one or more structures formed in or associated with the flexible emission layer and configured to provide optical feedback in the emission layer to produce a laser light output having at least one property representing an identifier.