Patents by Inventor Markus Knuefermann

Markus Knuefermann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AND RELATED METHOD
    Publication number: 20150168853
    Abstract: A lithography apparatus is disclosed, which comprises: a first component, a second component, a coupling device which is configured to couple the first and second components to one another, a capture device for capturing a movement of a floor on which the lithography apparatus stands, and a control device which is configured to actuate the coupling device depending on the captured movement of the floor in order to restrict a movement of the second component relative to the first component.
    Type: Application
    Filed: December 22, 2014
    Publication date: June 18, 2015
    Inventors: Mathias Schumacher, Burkhard Corves, Jens Kugler, Markus Knuefermann, Bernhard Geuppert, Stefan Xalter, Bernhard Gellrich
  • LITHOGRAPHY APPARATUS AND METHOD
    Publication number: 20140021324
    Abstract: A lithography apparatus is disclosed, which comprises: a first component, a second component, a coupling device which is configured to couple the first and second components to one another, a capture device for capturing a movement (Z) of a floor on which the lithography apparatus stands, and a control device which is configured to actuate the coupling device depending on the captured movement (Z) of the floor in order to restrict a movement of the second component relative to the first component.
    Type: Application
    Filed: July 3, 2013
    Publication date: January 23, 2014
    Inventors: Mathias Schumacher, Burkhard Corves, Jens Kugler, Markus Knuefermann, Bernhard Geuppert, Stefan Xalter, Bernhard Gellrich