Abstract: A micromechanical sensor, including: a substrate; a movable mass element sensitive in three spatial directions; two x-lateral electrodes for detecting a lateral x-deflection of the movable mass element; two y-lateral electrodes for detecting a lateral y-deflection of the movable mass element; z-electrodes for detecting a z-deflection of the movable mass element; each lateral electrode being fastened on the substrate with the aid of a fastening element; the fastening elements of all electrodes being formed close to a connection element of the movable mass element to the substrate.

Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.

Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.

Abstract: A micromechanical sensor, including: a substrate; a movable mass element sensitive in three spatial directions; two x-lateral electrodes for detecting a lateral x-deflection of the movable mass element; two y-lateral electrodes for detecting a lateral y-deflection of the movable mass element; z-electrodes for detecting a z-deflection of the movable mass element; each lateral electrode being fastened on the substrate with the aid of a fastening element; the fastening elements of all electrodes being formed close to a connection element of the movable mass element to the substrate.

Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.

Abstract: A sensor system, for sensing at least one property of a measured gas in a measured-gas space, includes a probe for sensing the property of the measured gas. The probe has at least one sensor element and at least one housing surrounding the sensor element. The housing is configured so that the sensor element in the housing is capable of being impinged upon with the measured gas. The sensor system also includes a receiving element connectable to a wall of the measured-gas space. The probe is introducible along an insertion axis into the receiving element and securable in the receiving element. The probe is capable of being sealed off from the measured-gas space by at least one seal. The seal encompasses at least one linear seal.

Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.

Abstract: Gas sensors are provided that are fashioned such that there is an increased flow over the sensor element. In this way, a good measurement dynamic is achieved even when these gas sensors are exposed to exhaust gases having a low flow speed.

Abstract: A sensor system, for sensing at least one property of a measured gas in a measured-gas space, includes a probe for sensing the property of the measured gas. The probe has at least one sensor element and at least one housing surrounding the sensor element. The housing is configured so that the sensor element in the housing is capable of being impinged upon with the measured gas. The sensor system also includes a receiving element connectable to a wall of the measured-gas space. The probe is introducible along an insertion axis into the receiving element and securable in the receiving element. The probe is capable of being sealed off from the measured-gas space by at least one seal. The seal encompasses at least one linear seal.

Abstract: Gas sensors are provided that are fashioned such that there is an increased flow over the sensor element. In this way, a good measurement dynamic is achieved even when these gas sensors are exposed to exhaust gases having a low flow speed.