Patents by Inventor Markus Menath

Markus Menath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11282805
    Abstract: A semiconductor device includes a silicon carbide layer, a metal carbide layer arranged over the silicon carbide layer, and a solder layer arranged over and in contact with the metal carbide layer.
    Type: Grant
    Filed: March 21, 2019
    Date of Patent: March 22, 2022
    Assignee: Infineon Technologies AG
    Inventors: Michael Roesner, Markus Menath, Gudrun Stranzl
  • Patent number: 11077525
    Abstract: A method of processing silicon carbide containing crystalline substrate is provided. The method includes pyrolyzing a surface of the silicon carbide containing crystalline substrate to produce a silicon and carbon containing debris layer over the silicon carbide containing crystalline substrate, and removing the silicon and carbon containing debris layer, wherein the pyrolyzing and the removing is repeated at least once.
    Type: Grant
    Filed: April 3, 2019
    Date of Patent: August 3, 2021
    Assignee: Infineon Technologies AG
    Inventors: Michael Roesner, Markus Menath, Gudrun Stranzl
  • Patent number: 10510626
    Abstract: In one embodiment, a wafer includes a number of die areas each including a semiconductor device and dedicated to become a separate die. The die areas are disposed on a first face of the wafer and wherein adjacent die areas are distanced from one another. A first trench and a second trench are formed on the first face between adjacent die areas. The first trench and the second trench are spaced apart from one another by a ridge. A third trench is disposed above the ridge on a second face of the wafer.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: December 17, 2019
    Assignee: Infineon Technologies AG
    Inventors: Michaela Braun, Markus Menath
  • Publication number: 20190308274
    Abstract: A method of processing silicon carbide containing crystalline substrate is provided. The method includes pyrolyzing a surface of the silicon carbide containing crystalline substrate to produce a silicon and carbon containing debris layer over the silicon carbide containing crystalline substrate, and removing the silicon and carbon containing debris layer, wherein the pyrolyzing and the removing is repeated at least once.
    Type: Application
    Filed: April 3, 2019
    Publication date: October 10, 2019
    Inventors: Michael Roesner, Markus Menath, Gudrun Stranzl
  • Publication number: 20190295981
    Abstract: A semiconductor device includes a silicon carbide layer, a metal carbide layer arranged over the silicon carbide layer, and a solder layer arranged over and in contact with the metal carbide layer.
    Type: Application
    Filed: March 21, 2019
    Publication date: September 26, 2019
    Inventors: Michael Roesner, Markus Menath, Gudrun Stranzl
  • Patent number: 10090192
    Abstract: A method for producing a rounded conductor line of a semiconductor component is disclosed. In that method, a partially completed semiconductor component is provided. The partially completed semiconductor component has a bottom side and a top side spaced distant from the bottom side in a vertical direction. Also provided is an etchant. On the top side, a dielectric layer is arranged. The dielectric layer has at least two different regions that show different etch rates when they are etched with the etchant. Subsequently, a trench is formed in the dielectric layer such that the trench intersects each of the different regions. Then, the trench is widened by etching the trench with the etchant at different etch rates. By filling the widened trench with an electrically conductive material, a conductor line is formed.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: October 2, 2018
    Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Matthias Stecher, Markus Menath, Andreas Zankl, Anja Reitmeier
  • Patent number: 9981843
    Abstract: A method of producing a chip package is described. A plurality of chips is provided on a first wafer. Each chip has a cavity which opens to a first main face of the chip. The cavities are filled or covered temporarily. The chips are then singulated. The singulated chips are embedded in an encapsulation material, and then the cavities are re-exposed.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: May 29, 2018
    Assignee: Infineon Technologies AG
    Inventors: Dominic Maier, Alfons Dehe, Thomas Kilger, Markus Menath, Franz Xaver Muehlbauer, Daniel Porwol, Juergen Wagner
  • Patent number: 9780161
    Abstract: A method for manufacturing an electronic device and an electronic device are disclosed. In an embodiment the method comprises forming an opening in an isolation layer, isotropically etching the opening thereby forming an extended opening with curved sidewalls, and forming a conductive material in the opening.
    Type: Grant
    Filed: August 27, 2015
    Date of Patent: October 3, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Menath, Thomas Fischer, Hermann Wendt
  • Publication number: 20170092552
    Abstract: In one embodiment, a wafer includes a number of die areas each including a semiconductor device and dedicated to become a separate die. The die areas are disposed on a first face of the wafer and wherein adjacent die areas are distanced from one another. A first trench and a second trench are formed on the first face between adjacent die areas. The first trench and the second trench are spaced apart from one another by a ridge. A third trench is disposed above the ridge on a second face of the wafer.
    Type: Application
    Filed: December 13, 2016
    Publication date: March 30, 2017
    Applicant: Infineon Technologies AG
    Inventors: Michaela Braun, Markus Menath
  • Publication number: 20170084468
    Abstract: In various embodiments, a method for processing a wafer may include: providing a wafer having at least one die region and at least one metallization disposed over the at least one die region; covering the at least one metallization with a protecting layer; plasma etching the wafer to form at least one die.
    Type: Application
    Filed: December 1, 2016
    Publication date: March 23, 2017
    Inventor: Markus Menath
  • Patent number: 9576875
    Abstract: A method for manufacturing a chip arrangement is provided, the method including: forming a hole in a carrier including at least one chip, wherein forming a hole in the carrier includes: selectively removing carrier material, thereby forming a cavity in the carrier, forming passivation material over one or more cavity walls exposed by the selective removal of the carrier material; selectively removing a portion of the passivation material and further carrier material exposed by the selective removal of the passivation material, wherein a further portion of the passivation material remains over at least one cavity side wall; the method further including subsequently forming a layer over the further portion of passivation material remaining over the at least one cavity side wall.
    Type: Grant
    Filed: January 7, 2015
    Date of Patent: February 21, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Reinhard Hess, Katharina Umminger, Gabriel Maier, Markus Menath, Gunther Mackh, Hannes Eder, Alexander Heinrich
  • Patent number: 9553021
    Abstract: In various embodiments, a method for processing a wafer may include: providing a wafer having at least one die region and at least one metallization disposed over the at least one die region; covering the at least one metallization with a protecting layer; plasma etching the wafer to form at least one die.
    Type: Grant
    Filed: September 3, 2012
    Date of Patent: January 24, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventor: Markus Menath
  • Patent number: 9553022
    Abstract: In one embodiment, a wafer includes a number of die areas each including a semiconductor device and dedicated to become a separate die. The die areas are disposed on a first face of the wafer and wherein adjacent die areas are distanced from one another. A first trench and a second trench are formed on the first face between adjacent die areas. The first trench and the second trench are spaced apart from one another by a ridge. A third trench is disposed above the ridge on a second face of the wafer.
    Type: Grant
    Filed: July 6, 2015
    Date of Patent: January 24, 2017
    Assignee: Infineon Technologies AG
    Inventors: Michaela Braun, Markus Menath
  • Publication number: 20170011963
    Abstract: In one embodiment, a wafer includes a number of die areas each including a semiconductor device and dedicated to become a separate die. The die areas are disposed on a first face of the wafer and wherein adjacent die areas are distanced from one another. A first trench and a second trench are formed on the first face between adjacent die areas. The first trench and the second trench are spaced apart from one another by a ridge. A third trench is disposed above the ridge on a second face of the wafer.
    Type: Application
    Filed: July 6, 2015
    Publication date: January 12, 2017
    Inventors: Michaela Braun, Markus Menath
  • Publication number: 20160311679
    Abstract: A method of producing a chip package is described. A plurality of chips is provided on a first wafer. Each chip has a cavity which opens to a first main face of the chip. The cavities are filled or covered temporarily. The chips are then singulated. The singulated chips are embedded in an encapsulation material, and then the cavities are re-exposed.
    Type: Application
    Filed: April 26, 2016
    Publication date: October 27, 2016
    Inventors: Dominic Maier, Alfons Dehe, Thomas Kilger, Markus Menath, Franz Xaver Muehlbauer, Daniel Porwol, Juergen Wagner
  • Publication number: 20160064273
    Abstract: A method for producing a rounded conductor line of a semiconductor component is disclosed. In that method, a partially completed semiconductor component is provided. The partially completed semiconductor component has a bottom side and a top side spaced distant from the bottom side in a vertical direction. Also provided is an etchant. On the top side, a dielectric layer is arranged. The dielectric layer has at least two different regions that show different etch rates when they are etched with the etchant. Subsequently, a trench is formed in the dielectric layer such that the trench intersects each of the different regions. Then, the trench is widened by etching the trench with the etchant at different etch rates. By filling the widened trench with an electrically conductive material, a conductor line is formed.
    Type: Application
    Filed: November 9, 2015
    Publication date: March 3, 2016
    Inventors: Matthias Stecher, Markus Menath, Andreas Zankl, Anja Gissibl
  • Publication number: 20150380306
    Abstract: A method for forming a vertical electrical conductive connection includes forming an electrically insulating layer including at least one hole reaching vertically through the electrically insulating layer and depositing an electrically conductive layer. A surface of the electrically conductive layer includes a recess at the location of the at least one hole of the electrically insulating layer. Further, the method includes forming a smoothing layer on the electrically conductive layer and etching the smoothing layer and the electrically conductive layer until the electrically conductive layer is removed above at least a part of a surface of the electrically insulating layer and remains within the at least one hole.
    Type: Application
    Filed: June 30, 2014
    Publication date: December 31, 2015
    Inventor: Markus Menath
  • Publication number: 20150372073
    Abstract: A method for manufacturing an electronic device and an electronic device are disclosed. In an embodiment the method comprises forming an opening in an isolation layer, isotropically etching the opening thereby forming an extended opening with curved sidewalls, and forming a conductive material in the opening.
    Type: Application
    Filed: August 27, 2015
    Publication date: December 24, 2015
    Inventors: Markus Menath, Thomas Fischer, Hermann Wendt
  • Patent number: 9214424
    Abstract: A method for producing a rounded conductor line of a semiconductor component is disclosed. In that method, a partially completed semiconductor component is provided. The partially completed semiconductor component has a bottom side and a top side spaced distant from the bottom side in a vertical direction. Also provided is an etchant. On the top side, a dielectric layer is arranged. The dielectric layer has at least two different regions that show different etch rates when they are etched with the etchant. Subsequently, a trench is formed in the dielectric layer such that the trench intersects each of the different regions. Then, the trench is widened by etching the trench with the etchant at different etch rates. By filling the widened trench with an electrically conductive material, a conductor line is formed.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: December 15, 2015
    Assignee: Infineon Technologies Austria AG
    Inventors: Matthias Stecher, Markus Menath, Andreas Zankl, Anja Gisslbl
  • Patent number: 9183977
    Abstract: A method for manufacturing an electronic device and an electronic device are disclosed. In an embodiment the method comprises forming an opening in an isolation layer, isotropically etching the opening thereby forming an extended opening with curved sidewalls, and forming a conductive material in the opening.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: November 10, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Menath, Thomas Fischer, Hermann Wendt