Abstract: An optical apparatus for a lithography system comprises at least one optical element comprising an optical surface. The optical apparatus also comprises one or more actuators for deforming the optical surface. A strain gauge device is provided for determining the deformation of the optical surface. The strain gauge device comprises at least one optical fiber that maintains polarization.

Abstract: A component for a projection exposure apparatus for semiconductor lithography, comprises an optical element and an actuator, which are force-fittingly connected to each other. The actuator at least locally deforms the optical element. The actuator can be configured to minimize the loss in rigidity at the peripheries delimiting the actuator on the imaging quality. A method for designing a component of projection exposure apparatus is provided.

Abstract: A connection device, in particular a screw connection device, including: an energy supply device; a communication device, and a sensor system, wherein the energy supply device is configured to supply the sensor system and/or the communication device with energy, wherein the communication device is configured to transfer a sensor value with the aid of the sensor system to the outside.

Abstract: A peak detector for synchronized switch harvesting on inductor converter includes a comparator and a filter for filtering an input signal to the peak detector and for providing a filtered signal to an input of the comparator. The filter has differentiating and integrating transfer characteristics for low and high frequency ranges, respectively, of the input signal so that peaks of the input signal to the peak detector which have primarily frequency components in the low range cause a relatively strong variation of the filtered signal and peaks of the input signal to the peak detector which have primarily frequency components in the high range are substantially integrated and cause a relatively weak variation of the filtered signal. The relatively strong variation of the filtered signal crosses a threshold of the comparator, which is configured to generate an output signal indicating a relation of the filtered signal regarding the comparator threshold.

Abstract: A peak detector for synchronized switch harvesting on inductor converter includes a comparator and a filter for filtering an input signal to the peak detector and for providing a filtered signal to an input of the comparator. The filter has differentiating and integrating transfer characteristics for low and high frequency ranges, respectively, of the input signal so that peaks of the input signal to the peak detector which have primarily frequency components in the low range cause a relatively strong variation of the filtered signal and peaks of the input signal to the peak detector which have primarily frequency components in the high range are substantially integrated and cause a relatively weak variation of the filtered signal. The relatively strong variation of the filtered signal crosses a threshold of the comparator, which is configured to generate an output signal indicating a relation of the filtered signal regarding the comparator threshold.

Abstract: A control circuit according to an embodiment of the present invention for a DC-DC converter which has an input, an output and a series connection of a differentiator, a comparator unit, and an integrator. The series connection is coupled in between the input and the output. The comparator unit has an inverting amplifier.

Abstract: The present invention provides a voltage converter circuit for the clocked supply of energy to an energy storage based on an input voltage applied at an input applied at an input of the voltage converter circuit. The voltage converter circuit includes an energy storage and a switch arrangement, wherein the switch arrangement has a first switch and a second switch which are connected in parallel to each other and coupled to the energy storage. The first switch of the switch arrangement has a smaller turn-on voltage according to amount than the second switch, wherein a control terminal of the first switch is wired up such that the first switch is active in a startup phase of the voltage converter circuit to supply energy to the energy storage, and wherein a control terminal of the second switch is wired up such that the second switch is active after the startup phase to supply energy to the energy storage in a clocked way.

Abstract: A control circuit according to an embodiment of the present invention for a DC-DC converter which has an input, an output and a series connection of a differentiator, a comparator unit, and an integrator. The series connection is coupled in between the input and the output. The comparator unit has an inverting amplifier.

Abstract: The present invention provides a voltage converter circuit for the clocked supplying of energy to an energy storage, based on an input voltage present at an input of the voltage converter circuit. The voltage converter circuit comprises an energy storage and a switch assembly, the switch assembly comprising a first switch and a second switch connected in parallel and coupled to the energy storage. The first switch of the switch assembly exhibits, according to magnitude, a smaller turn-on voltage than the second switch, wherein a control terminal of the first switch is switched such that the first switch is active in a starting phase of the voltage converter circuit in order to supply the energy storage with energy, and wherein a control terminal of the second switch is switched such that the second switch is active after the starting phase in order to supply the energy storage with energy in a clocked manner.

Abstract: The present invention provides a voltage converter circuit for the clocked supply of energy to an energy storage based on an input voltage applied at an input applied at an input of the voltage converter circuit. The voltage converter circuit includes an energy storage and a switch arrangement, wherein the switch arrangement has a first switch and a second switch which are connected in parallel to each other and coupled to the energy storage. The first switch of the switch arrangement has a smaller turn-on voltage according to amount than the second switch, wherein a control terminal of the first switch is wired up such that the first switch is active in a startup phase of the voltage converter circuit to supply energy to the energy storage, and wherein a control terminal of the second switch is wired up such that the second switch is active after the startup phase to supply energy to the energy storage in a clocked way.

Abstract: The present invention provides a voltage converter circuit for the clocked supplying of energy to an energy storage, based on an input voltage present at an input of the voltage converter circuit. The voltage converter circuit comprises an energy storage and a switch assembly, the switch assembly comprising a first switch and a second switch connected in parallel and coupled to the energy storage. The first switch of the switch assembly exhibits, according to magnitude, a smaller turn-on voltage than the second switch, wherein a control terminal of the first switch is switched such that the first switch is active in a starting phase of the voltage converter circuit in order to supply the energy storage with energy, and wherein a control terminal of the second switch is switched such that the second switch is active after the starting phase in order to supply the energy storage with energy in a clocked manner.