Abstract: An optical apparatus for a lithography system comprises at least one optical element comprising an optical surface. The optical apparatus also comprises one or more actuators for deforming the optical surface. A strain gauge device is provided for determining the deformation of the optical surface. The strain gauge device comprises at least one optical fiber that maintains polarization.

Abstract: A component for a projection exposure apparatus for semiconductor lithography, comprises an optical element and an actuator, which are force-fittingly connected to each other. The actuator at least locally deforms the optical element. The actuator can be configured to minimize the loss in rigidity at the peripheries delimiting the actuator on the imaging quality. A method for designing a component of projection exposure apparatus is provided.

Abstract: A projection exposure apparatus comprises an optical element. The optical element comprises a main body and an actuator for deforming an optically effective surface formed on the main body. The actuator is in a recess in the rear side of the main body.

Abstract: A method for measuring an actuator in a projection exposure apparatus for semiconductor lithography, comprises: driving and deflecting a first actuator with a constant control signal; deflecting a further actuator by way of the mechanical coupling; and determining the capacitance of the further actuator, which was deflected by way of the coupling. A projection exposure apparatus for semiconductor lithography comprises a control device and a measuring device, wherein the measuring device is configured to determine the capacitance of at least one actuator in the projection exposure apparatus.

Abstract: An adaptive optical element for microlithography comprises at least one manipulator for changing the shape of an optical surface of the optical element. The manipulator comprises a dielectric medium which is deformable via an electric field, work electrodes for generating the electric field in the dielectric medium, and a measuring electrode for measuring temperature. The measuring electrode is arranged in a direct assemblage with the dielectric medium. The measuring electrode has a temperature-dependent resistance.

Abstract: An adaptive optical element for microlithography comprises at least one manipulator for changing the shape of an optical surface of the optical element. The manipulator comprises a one-piece dielectric medium which is deformable by applying an electric field, electrodes that are arranged in interconnection with the one-piece dielectric medium, and a voltage generator which is wired to the electrodes and configured to apply to the electrodes, firstly, a control voltage that serves to change a longitudinal extent of the dielectric medium and, secondly, an AC voltage that serves to heat the dielectric medium.

Abstract: An optical assembly for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is constructed from at least three sections, which include at least first and second group of sections that are controllable in each case via a controller are present. The first group serves for coarse actuation, and the second group serves for fine actuation. The controller is configured to control the groups independently of one another and the sections of a group jointly. The controller is furthermore configured to variably set the number of sections controlled jointly per group. Furthermore, the disclosure relates to a projection exposure apparatus equipped with the assembly, and to a method for controlling the optical assembly.

Abstract: An optical system comprises at least one mirror having a mirror body and a mirror surface, and at least one actuator device coupled to the mirror body and serving for deforming the mirror surface. The actuator device comprises at least one electrostrictive actuator element for generating a mechanical stress in the mirror body for deforming the mirror surface depending on an electrical drive voltage, and at least one electrostrictive sensor element for outputting a sensor signal depending on a deformation of the sensor element. The at least one sensor element is arranged directly adjacent to the actuator element and/or is arranged in such a way that it is configured at least partly for transferring the mechanical stress generated by the actuator element to the mirror body.

Abstract: An optical assembly of a projection exposure apparatus for semiconductor lithography comprises an optical element and an actuator for deforming the optical element. The actuator is subjected to a bias voltage by a controller that is present. A projection exposure apparatus for semiconductor lithography comprises an optical assembly. A method for operating an actuator for deforming an optical element for semiconductor lithography comprises subjecting the actuator to a bias voltage by a controller.

Abstract: The invention relates to a method for operating a braiding, winding or spiraling machine for braiding around, wrapping around or spiraling around a strand-like material, in particular a cable, with at least one elongate material strand formed from at least one elongate material fibre, in particular from at least one wire. In the method, a diameter of the strand-like material is measured and a feed rate of the strand-like material and/or a rotational speed at which the at least one elongate material strand moves about the longitudinal axis of the strand-like material is controlled by open-loop or closed-loop control depending on said diameter measured. A predefined degree of coverage of the strand-like material by the at least one elongate material strand can be kept substantially constant by means of an open-loop or closed-loop control of the relative feed rate of the strand-like material depending on the diameter measured.

Abstract: A gripper device (16; 30; 56; 90; 120) which is designed so as to be movable along a movement path, and which serves for grasping and holding a workpiece (70) and for moving the workpiece along the movement path, with at least one first contact section (18; 38; 66) which, to produce an operative pairing with the workpiece that effects the gripping or holding action, can be driven relative to a second contact section (20; 40; 68), which first contact section is assigned actuator means (22; 44; 54; 128), which are designed to exert a drive force in reaction to the application of a magnetic field, and which are composed of a magnetic shape-memory alloy material, wherein the actuator means for magnetic interaction are formed, for the application of a magnetic field, with magnetic field generating means that are static at one position of the movement path (52; 80; 86; 88), and/or with magnetic field generating means that are provided so as to be movable independently of the gripper device.

Abstract: Sensor means for detection of bioelectrical signals, in particular, for implantation into or onto a brain wherein the sensor means comprises a first number of electrodes which can be coupled to a biological organism, in particular, to neural cells of a nervous system for tapping a first plurality of electrical potentials at the biological organism. According to the invention, the sensor means comprises means for providing an averaged electrical reference potential. The averaged electrical reference potential is formed from a plurality of detected electrical potential that are tapped at the biological organism.

Abstract: A device for electrolytically coating an object is disclosed. In one aspect, the device includes an electrolyte container containing an electrolyte and a first DC power source. The device also includes at least one soluble anode which is at least partly immersed into the electrolyte and electrically conductive connected to a positive pole of the first DC power source. The device also includes at least one cathode terminal which is electrically conductive connected to a negative pole of the first DC power source and to which the object is electrically conductive connected, the object being immersed into the electrolyte. The device further includes a second DC power source configured to operate independently of the first DC power source and at least one insoluble anode, which is at least partly immersed into the electrolyte and electrically conductive connected to a positive pole of the second DC power source.

Abstract: A gripper device (16; 30; 56; 90; 120) which is designed so as to be movable along a movement path, and which serves for grasping and holding a workpiece (70) and for moving the workpiece along the movement path, with at least one first contact section (18; 38; 66) which, to produce an operative pairing with the workpiece that effects the gripping or holding action, can be driven relative to a second contact section (20; 40; 68), which first contact section is assigned actuator means (22; 44; 54; 128), which are designed to exert a drive force in reaction to the application of a magnetic field, and which are composed of a magnetic shape-memory alloy material, wherein the actuator means for magnetic interaction are formed, for the application of a magnetic field, with magnetic field generating means that are static at one position of the movement path (52; 80; 86; 88), and/or with magnetic field generating means that are provided so as to be movable independently of the gripper device.

Abstract: A device for electrolytically coating an object is disclosed. In one aspect, the device includes an electrolyte container containing an electrolyte and a first DC power source. The device also includes at least one soluble anode which is at least partly immersed into the electrolyte and electrically conductive connected to a positive pole of the first DC power source. The device also includes at least one cathode terminal which is electrically conductive connected to a negative pole of the first DC power source and to which the object is electrically conductive connected, the object being immersed into the electrolyte. The device further includes a second DC power source configured to operate independently of the first DC power source and at least one insoluble anode, which is at least partly immersed into the electrolyte and electrically conductive connected to a positive pole of the second DC power source.

Abstract: Sensor means for detection of bioelectrical signals, in particular, for implantation into or onto a brain wherein the sensor means comprises a first number of electrodes which can be coupled to a biological organism, in particular, to neural cells of a nervous system for tapping a first plurality of electrical potentials at the biological organism. According to the invention, the sensor means comprises means for providing an averaged electrical reference potential. The averaged electrical reference potential is formed from a plurality of detected electrical potential that are tapped at the biological organism.

Abstract: In a method and apparatus for assisting the driver of a vehicle in maintaining a traffic lane limited by traffic lane markings, the traffic lane markings and the position of the vehicle in the traffic lane are detected. Upon an actual or impending change of traffic lanes a lane change warning is output to the driver of the vehicle in a first step, and a course correcting actuating intervention counteracting the lane change is carried out in a second step. The actuating intervention is carried out only if the change of traffic lanes is impermissible due to the type of traffic lane marking to be crossed during the traffic lane change, or if the lane change is not possible without danger due to collision-endangering objects present on the side of the traffic lane.

Abstract: In a method and apparatus for assisting the driver of a vehicle in maintaining a traffic lane limited by traffic lane markings, the traffic lane markings and the position of the vehicle in the traffic lane are detected. Upon an actual or impending change of traffic lanes a lane change warning is output to the driver of the vehicle in a first step, and a course correcting actuating intervention counteracting the lane change is carried out in a second step. The actuating intervention is carried out only if the change of traffic lanes is impermissible due to the type of traffic lane marking to be crossed during the traffic lane change, or if the lane change is not possible without danger due to collision-endangering objects present on the side of the traffic lane.

Abstract: A method for operating a vehicle having a collision avoidance system including a sensor for sensing potential other parties to a collision and having an evaluator, connected to a control unit, for evaluating a risk of a collision. It is proposed that when the other party to a collision comes relatively close in the lateral direction, an actuator system is activated in order to predefine a setpoint trajectory of the vehicle in order to avoid a lateral collision. In addition, a device for operating the method is provided.

Abstract: The invention relates to a device and a method for stabilizing a vehicle, having a detection device (10) which is provided for determining an actual value of a lateral dynamics variable which describes the lateral dynamics of the vehicle, and having an evaluation unit (11) which determines a setpoint value for the lateral dynamics variable and limits said setpoint value to a limit value which is determined as a function of a prescribed stability condition if it is found that the magnitude of the setpoint value of the lateral dynamics variable exceeds the magnitude of the determined limit value, with the evaluation unit (11) actuating vehicle assemblies (12), which are provided for influencing the longitudinal and/or lateral dynamics of the vehicle, as a function of a comparison of the determined actual value and the determined and possibly limited setpoint value of the lateral dynamics variable in such a way that the driving stability of the vehicle is increased.