Patents by Inventor Markus Schultheis

Markus Schultheis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11566320
    Abstract: The present invention relates to a sputtering target comprising Ni, W and, optionally, one or more further metal(s) X selected from the group of the refractory metals, Sn, Al and Si, which has a normalized peak intensity ratio PIR=INi/IW·(AW+Ax)/ANi of 0.40 or greater, wherein INi is the intensity of the (111) peak of Ni, IW is the intensity of the (110) peak of W, Aw is the fraction of W in the target in atom %, Ax is the total fraction of the one or more further metals selected from the group of the refractory metals, Sn, Al and Si in the target in atom %, ANi is the fraction of Ni in the target in atom %, and wherein the intensities of the peaks are determined by X-ray powder diffraction using Cu-Kalpha radiation.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: January 31, 2023
    Assignee: Materion Advanced Materials Germany GmbH
    Inventors: Markus Schultheis, Martin Schlott
  • Publication number: 20210156023
    Abstract: The present invention relates to a sputtering target comprising Ni, W and, optionally, one or more further metal(s) X selected from the group of the refractory metals, Sn, Al and Si, which has a normalized peak intensity ratio PIR=INi/Iw·(Aw+Ax)/ANI of 0.40 or greater, wherein INi is the intensity of the (111) peak of Ni, Iw is the intensity of the (110) peak of W, Aw is the fraction of W in the target in atom %, Ax is the total fraction of the one or more further metals selected from the group of the refractory metals, Sn, Al and Si in the target in atom %, ANi is the fraction of Ni in the target in atom %, and wherein the intensities of the peaks are determined by X-ray powder diffraction using Cu-Kalpha radiation.
    Type: Application
    Filed: November 24, 2020
    Publication date: May 27, 2021
    Applicant: Materion Advanced Materials Germany GmbH
    Inventors: Markus Schultheis, Martin SCHLOTT
  • Publication number: 20200002235
    Abstract: Known cylindrical sputtering targets comprise a substrate and a target material that forms a layer on the substrate, said layer has a thickness d, wherein the target material comprises TiOx as the main component, and x is within a range of 1<x<2. Starting therefrom and in order to provide large-sized cylindrical sputtering targets with a thick target layer comprising sub-stoichiometric TiO2 it is proposed that x is within a range of 1.45<x<1.7 that allows a target layer thickness d which is larger than 10 mm.
    Type: Application
    Filed: March 5, 2018
    Publication date: January 2, 2020
    Inventors: Markus Schultheis, Christoph Simons, Martin Schlott
  • Patent number: 10487392
    Abstract: A double-layer system includes a metal layer facing away from a viewer and a coating facing the viewer. In order to make the layer system production process as simple as possible and to provide a sputter deposition method that dispenses entirely with the use of reactive gases in the sputtering atmosphere or requires only a small amount thereof, the coating is in the form of an optically partially absorbing layer which has an absorption coefficient kappa of less than 0.7 at a wavelength of 550 nm and a thickness ranging from 30 to 55 nm.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: November 26, 2019
    Assignee: MATERION ADVANCED MATERIALS GERMANY GMBH
    Inventors: Martin Schlott, Albert Kastner, Markus Schultheis, Jens Wagner
  • Patent number: 10347472
    Abstract: The present invention relates to a sputtering target, which comprises a zirconium oxide as a sputtering material, wherein the zirconium oxide has an oxygen deficiency, compared to the oxygen content of its fully oxidized form, of at least 0.40 wt %, has a total amount of metal elements other than zirconium of less than 3.0 wt %, based on the total amounts of metal elements including zirconium, and has an X-ray powder diffraction pattern having a peak P1 at 28.2°+/?0.2° 2-theta, a peak P2 at 31.4°+/?0.2° 2-theta, and a peak P3 at 30.2°+/?0.2° 2-theta.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: July 9, 2019
    Assignee: MATERION ADVANCED MATERIALS GERMANY GMBH
    Inventors: Christoph Simons, Andreas Herzog, Markus Schultheis, Anna Schott
  • Publication number: 20190161829
    Abstract: The invention relates to a process for preparation of the intermetallic compound Nb3Sn by melt metallurgical procedure. The process comprises the steps of pressing Nb particles and Sn particles to form a start electrode, whereby the pressed start electrode is remelted in a vacuum in an electric arc, whereby a first moulded body is obtained. Alternatively, the process comprises the steps of remelting an Nb start electrode in an electric arc in a vacuum, whereby Sn particles are being introduced into the molten Nb forming during the remelting, whereby a first moulded body is obtained. The molar ratio of Nb and Sn is selected appropriately such that the first moulded body obtained contains at least 50% by weight of the intermetallic compound Nb3Sn as the A15 phase as well as free Nb and/or Sn and inevitable impurities, if applicable.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 30, 2019
    Inventors: Bernd Spaniol, Stefan Csirak, Markus Virgin, Markus Schultheis
  • Publication number: 20180223418
    Abstract: A double-layer system includes a metal layer facing away from a viewer and a coating facing the viewer. In order to make the layer system production process as simple as possible and to provide a sputter deposition method that dispenses entirely with the use of reactive gases in the sputtering atmosphere or requires only a small amount thereof, the coating is in the form of an optically partially absorbing layer which has an absorption coefficient kappa of less than 0.7 at a wavelength of 550 nm and a thickness ranging from 30 to 55 nm.
    Type: Application
    Filed: May 18, 2015
    Publication date: August 9, 2018
    Inventors: Martin SCHLOTT, Albert KASTNER, Markus SCHULTHEIS, Jens WAGNER
  • Publication number: 20180155820
    Abstract: The present invention relates to a sputtering target, which comprises a zirconium oxide as a sputtering material, wherein the zirconium oxide has an oxygen deficiency, compared to the oxygen content of its fully oxidized form, of at least 0.40 wt %, has a total amount of metal elements other than zirconium of less than 3.0 wt %, based on the total amounts of metal elements including zirconium, and has an X-ray powder diffraction pattern having a peak P1 at 28.2°+/?0.2° 2-theta, a peak P2 at 31.4°+/?0.2° 2-theta, and a peak P3 at 30.2°+/?0.2° 2-theta.
    Type: Application
    Filed: December 1, 2017
    Publication date: June 7, 2018
    Inventors: Christoph Simons, Andreas Herzog, Markus Schultheis, Anna Schott
  • Publication number: 20170062193
    Abstract: The invention claims a three dimensional sputter target comprising CuZnSn material, CuZn material or CuSn material. Exemplary has a CuZnSn material a Cu content ranging from 40 atomic percent to 60 atomic percent; a Zn content ranging from 20 atomic percent to 30 atomic percent; and a Sn content ranging from 20 atomic percent to 30 atomic percent, wherein the three dimensional sputter target has at least one principal axis dimension greater than 500 mm and the CuZnSn material has a grain size ranging from 0.005 mm to 5 mm. Additional to that claims the invention a method of producing the three dimensional sputter target.
    Type: Application
    Filed: April 30, 2015
    Publication date: March 2, 2017
    Inventors: Markus SCHULTHEIS, Christoph SIMONS
  • Publication number: 20160070033
    Abstract: A light-absorbing layer system includes an absorber layer having an oxidic matrix. The oxidic matrix is based on a base component made of zinc oxide, tin oxide and/or indium oxide, and on an added component which can replace the base component K1 up to a fraction of 75% by weight. The added component consists of niobium oxide, hafnium oxide, titanium oxide, tantalum oxide, vanadium oxide, yttrium oxide, zirconium oxide, aluminum oxide and/or mixtures thereof. A blackening component, made of molybdenum, tungsten and alloys and mixtures thereof, is distributed in the matrix and is present either as metal or as substoichiometric-oxidic compound of the metal, such that the layer material has a degree of reduction which is defined by an oxygen content of at most 65% of the stoichiometrically maximum oxygen content. The weight fraction of the blackening component is in the range between 20 and 50% by weight.
    Type: Application
    Filed: April 3, 2014
    Publication date: March 10, 2016
    Inventors: Martin SCHLOTT, Albert KASTNER, Markus SCHULTHEIS, Jens WAGNER, Suk-Jae LEE, Ben KAHLE
  • Patent number: 8974707
    Abstract: Planar or tubular sputtering targets made of a silver base alloy and at least one further alloy component selected from indium, tin, antimony, and bismuth accounting jointly for a weight fraction of 0.01 to 5.0% by weight are known. However, moving on to ever larger targets, spark discharges are evident and often lead to losses especially in the production of large and high-resolution displays having comparatively small pixels. For producing a sputtering target with a large surface area on the basis of a silver alloy of this type, which has a surface area of more than 0.3 m2 as a planar sputtering target and has a length of at least 1.0 m as a tubular sputtering target, and in which the danger of spark discharges is reduced and thus a sputtering process with comparatively high power density is made feasible, the invention proposes that the silver base alloy has a crystalline structure with a mean grain size of less than 120 ?m, an oxygen content of less than 50 wt.
    Type: Grant
    Filed: March 18, 2013
    Date of Patent: March 10, 2015
    Assignee: Heraeus Deutschland GmbH & Co. KG
    Inventors: Martin Schlott, Sabine Schneider-Betz, Uwe Konietzka, Markus Schultheis, Ben Kahle, Lars Ebel
  • Publication number: 20130264200
    Abstract: Planar or tubular sputtering targets made of a silver base alloy and at least one further alloy component selected from indium, tin, antimony, and bismuth accounting jointly for a weight fraction of 0.01 to 5.0% by weight are known. However, moving on to ever larger targets, spark discharges are evident and often lead to losses especially in the production of large and high-resolution displays having comparatively small pixels. For producing a sputtering target with a large surface area on the basis of a silver alloy of this type, which has a surface area of more than 0.3 m2 as a planar sputtering target and has a length of at least 1.0 m as a tubular sputtering target, and in which the danger of spark discharges is reduced and thus a sputtering process with comparatively high power density is made feasible, the invention proposes that the silver base alloy has a crystalline structure with a mean grain size of less than 120 ?m, an oxygen content of less than 50 wt.
    Type: Application
    Filed: March 18, 2013
    Publication date: October 10, 2013
    Applicant: Heraeus Materials Technology GmbH & Co. KG
    Inventors: Martin SCHLOTT, Sabine SCHNEIDER-BETZ, Uwe KONIETZKA, Markus SCHULTHEIS, Ben KAHLE, Lars EBEL
  • Patent number: 8496288
    Abstract: An outer side wall structure for a motor vehicle, in particular a passenger automobile, having a front section and a rear section, between which at least one door of the motor vehicle can be situated, and having an upper section and a lower section. It is provided that the sections form a peripheral frame.
    Type: Grant
    Filed: February 7, 2012
    Date of Patent: July 30, 2013
    Assignee: GM Global Technology Operations LLC
    Inventors: Marc Juettner, Markus Schultheis
  • Publication number: 20120200119
    Abstract: An outer side wall structure for a motor vehicle, in particular a passenger automobile, having a front section and a rear section, between which at least one door of the motor vehicle can be situated, and having an upper section and a lower section. It is provided that the sections form a peripheral frame.
    Type: Application
    Filed: February 7, 2012
    Publication date: August 9, 2012
    Applicant: GM GLOBAL TECHNOLOGY OPERATIONS LLC
    Inventors: Marc JUETTNER, Markus SCHULTHEIS
  • Publication number: 20090277777
    Abstract: A sputter target includes a sputter material made of an alloy or a material mixture composed of at least two components which are in a state of thermodynamic disequilibrium. The components are compacted by an isostatic or uniaxial cold-pressing process.
    Type: Application
    Filed: May 30, 2007
    Publication date: November 12, 2009
    Applicant: W.C. Heraeus GmbH
    Inventors: Markus Schultheis, Martin Weigert
  • Publication number: 20090250337
    Abstract: A tubular target is provided having a cylindrical carrier tube, at least one target tube arranged on its exterior surface, and a connecting layer arranged between the target tube and the carrier tube. The connecting layer is electrically conductive and has a wetting degree of >90%.
    Type: Application
    Filed: December 7, 2005
    Publication date: October 8, 2009
    Applicant: W.C. HERAEUS GMBH
    Inventors: Christoph Simons, Martin Schlott, Markus Schultheis, Martin Weigert, Lars Gusseck
  • Patent number: 7431808
    Abstract: An electrically conductive titanium dioxide sputter target with an electrical resistivity of less than 5 ?-cm, which contains as an additive at least one doping agent or a mixture of doping agents in an amount of less than 5 mole %. The doping agent or agents are selected from the group including indium oxide, zinc oxide, bismuth oxide, aluminum oxide, gallium oxide, antimony oxide, and zirconium oxide. This treatment renders the titanium dioxide sputter target suitable for use in a direct-current sputtering process without any negative effects on the properties of the coating.
    Type: Grant
    Filed: August 19, 2002
    Date of Patent: October 7, 2008
    Assignee: W.C. Heraeus GmbH & Co., KG
    Inventors: Markus Schultheis, Christoph Simons, Martin Weigert
  • Publication number: 20080187453
    Abstract: A material mixture is produced having a cobalt-based alloy as the predominant component and an additional component of at least TiOx. The material mixture may be formed into a sputter target by hot pressing.
    Type: Application
    Filed: April 11, 2008
    Publication date: August 7, 2008
    Applicant: W.C. HERAEUS GMBH
    Inventors: Markus SCHULTHEIS, Martin Weigert
  • Publication number: 20070240981
    Abstract: A sputter target is made of a material comprising at least two phases or components, wherein at least one minor phase has low solubility in the matrix and has a higher melting point than the matrix. The at least one minor phase has a mean particle size of 10 ?m maximum of its grains or of agglomerates formed by its grains, and the material has a density of at least 98% of its theoretical density.
    Type: Application
    Filed: January 19, 2007
    Publication date: October 18, 2007
    Applicant: W. C. HERAEUS GMBH
    Inventors: Martin SCHLOTT, Markus SCHULTHEIS
  • Publication number: 20060151320
    Abstract: A tubular sputtering target with a target body and with an attachment device arranged at at least one end of the target body. The attachment device and/or an end cover are joined with the target body by material joining or positive locking.
    Type: Application
    Filed: December 2, 2005
    Publication date: July 13, 2006
    Inventors: Martin Weigert, Markus Schultheis, Martin Schlott, Christoph Simons