Patents by Inventor Markus Theodoor Wilhelmus Van Der Heijden

Markus Theodoor Wilhelmus Van Der Heijden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method
    Patent number: 7342642
    Abstract: A method of pre-aligning a substrate in a lithographic apparatus is described. The substrate has at least one alignment mark provided on a side of the substrate. The method includes determining a relationship between a position of the at least one alignment mark, at least part of an edge of the substrate, and a center of the substrate. A substrate support is provided to support a substrate, the substrate support having at least one optical view window at a predetermined location to view a part of the side of the substrate. The substrate is placed on the substrate support on the basis of the relationship to position the at least one alignment mark in the at least one optical view window.
    Type: Grant
    Filed: June 20, 2005
    Date of Patent: March 11, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Henricus Wilhelmus Maria Van Buel, Peter Ten Berge, Markus Theodoor Wilhelmus Van Der Heijden