Patents by Inventor Marlene Winker

Marlene Winker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing a micromechanical component
    Patent number: 10336610
    Abstract: A method for producing a micromechanical component is provided, In a preparatory step, a substrate device of the micromechanical component and/or a cap device of the micromechanical component is patterned. In a first sub-step, a first pressure and/or a first chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a first cavern is formed, sealed from an environment of the micromechanical component, the first pressure prevailing in the first cavity and/or the first chemical composition being enclosed. In a second sub-step, a second pressure and/or a second chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a second cavity is formed, sealed from the environment of the micromechanical component and from the first cavity, the second pressure prevailing in the second cavity and/or the second chemical composition being enclosed.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: July 2, 2019
    Assignee: ROBERT BOSCH GMBH
    Inventors: Heiko Stahl, Andreas Scheurle, Hendrik Specht, Marlene Winker, Ralf Hausner, Volker Schmitz
  • METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
    Publication number: 20180111828
    Abstract: A method for producing a micromechanical component is provided, In a preparatory step, a substrate device of the micromechanical component and/or a cap device of the micromechanical component is patterned. In a first sub-step, a first pressure and/or a first chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a first cavern is formed, sealed from an environment of the micromechanical component, the first pressure prevailing in the first cavity and/or the first chemical composition being enclosed. In a second sub-step, a second pressure and/or a second chemical composition being adjusted, and the substrate device and the cap device being connected to each other so that a second cavity is formed, sealed from the environment of the micromechanical component and from the first cavity, the second pressure prevailing in the second cavity and/or the second chemical composition being enclosed.
    Type: Application
    Filed: October 23, 2017
    Publication date: April 26, 2018
    Inventors: Heiko Stahl, Andreas Scheurle, Hendrik Specht, Marlene Winker, Ralf Hausner, Volker Schmitz