Patents by Inventor Marlon W. Hug

Marlon W. Hug has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230298951
    Abstract: Test structures for wafers are disclosed. A device may include a silicon wafer including a number of die and a scribe area between two die of the number of die. The scribe area may include one or more test structures. The test structures may include a p-doped region and an n-doped region adjacent to the p-doped region. The test structures may also include a first contact electrically coupled to the p-doped region and a second contact electrically coupled to the n-doped region. The second contact may be proximate to the first contact. Associated devices, systems, and methods are also disclosed.
    Type: Application
    Filed: March 16, 2022
    Publication date: September 21, 2023
    Inventors: Chase M. Hunter, Marlon W. Hug, Stephen W. Russell, Rajesh Kamana, Amitava Majumdar, Radhakrishna Kotti, Ahmed N. Noemaun, Tejaswi K. Indukuri
  • Patent number: 10672500
    Abstract: Methods, systems, and devices for non-contact measurement of memory cell threshold voltage, including at one or more intermediate stages of fabrication, are described. One access line may be grounded and coupled with one or more memory cells. Each of the one or more memory cells may be coupled with a corresponding floating access line. A floating access line may be scanned with an electron beam configured to set the floating access line to a particular surface voltage at the scanned bit line, and the threshold voltage of the corresponding memory cell may be determined based on whether setting the scanned bit line to the surface voltage causes a detectable amount current to flow through the corresponding memory cell.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: June 2, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Patent number: 10650891
    Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: May 12, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Publication number: 20190355418
    Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
    Type: Application
    Filed: May 22, 2019
    Publication date: November 21, 2019
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Publication number: 20190341122
    Abstract: Methods, systems, and devices for non-contact measurement of memory cell threshold voltage, including at one or more intermediate stages of fabrication, are described. One access line may be grounded and coupled with one or more memory cells. Each of the one or more memory cells may be coupled with a corresponding floating access line. A floating access line may be scanned with an electron beam configured to set the floating access line to a particular surface voltage at the scanned bit line, and the threshold voltage of the corresponding memory cell may be determined based on whether setting the scanned bit line to the surface voltage causes a detectable amount current to flow through the corresponding memory cell.
    Type: Application
    Filed: May 22, 2019
    Publication date: November 7, 2019
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Patent number: 10403359
    Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
    Type: Grant
    Filed: March 12, 2018
    Date of Patent: September 3, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Patent number: 10381101
    Abstract: Methods, systems, and devices for non-contact measurement of memory cell threshold voltage, including at one or more intermediate stages of fabrication, are described. One access line may be grounded and coupled with one or more memory cells. Each of the one or more memory cells may be coupled with a corresponding floating access line. A floating access line may be scanned with an electron beam configured to set the floating access line to a particular surface voltage at the scanned bit line, and the threshold voltage of the corresponding memory cell may be determined based on whether setting the scanned bit line to the surface voltage causes a detectable amount current to flow through the corresponding memory cell.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: August 13, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Publication number: 20190189209
    Abstract: Methods, systems, and devices for non-contact electron beam probing techniques, including at one or more intermediate stages of fabrication, are described. One subset of first access lines may be grounded and coupled with one or more memory cells. A second subset of first access lines may be floating and coupled with one or more memory cells. A second access line may correspond to each first access line and may be configured to be coupled with the corresponding first access line, by way of one or more corresponding memory cells, when scanned with an electron beam. A leakage path may be determined by comparing an optical pattern generated in part by determining a brightness of each scanned access line and comparing the generated optical pattern with a second optical pattern.
    Type: Application
    Filed: March 12, 2018
    Publication date: June 20, 2019
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug
  • Publication number: 20190189237
    Abstract: Methods, systems, and devices for non-contact measurement of memory cell threshold voltage, including at one or more intermediate stages of fabrication, are described. One access line may be grounded and coupled with one or more memory cells. Each of the one or more memory cells may be coupled with a corresponding floating access line. A floating access line may be scanned with an electron beam configured to set the floating access line to a particular surface voltage at the scanned bit line, and the threshold voltage of the corresponding memory cell may be determined based on whether setting the scanned bit line to the surface voltage causes a detectable amount current to flow through the corresponding memory cell.
    Type: Application
    Filed: December 20, 2017
    Publication date: June 20, 2019
    Inventors: Amitava Majumdar, Rajesh Kamana, Hongmei Wang, Shawn D. Lyonsmith, Ervin T. Hill, Zengtao T. Liu, Marlon W. Hug