Patents by Inventor Marshall E. E. Smith

Marshall E. E. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a compact sensing apparatus in a dual-piece monolithic substrate
    Publication number: 20020173065
    Abstract: A sensing apparatus having a sensor formed in a monolithic semiconductor substrate and oriented orthogonally to a signal conditioner is provided. The sensor generates a sensing signal in response to a predetermined physical stimulus. A signal conditioner electrically connected and responsive to the sensor conditions the sensing signal. The sensor and signal conditioner are formed on wafer surfaces of a single semiconductor substrate cut from a semiconductor wafer. The substrate is separated, one portion having the sensor formed on therein and the other having formed therein the signal conditioner. The portions are oriented and rejoined to form a monolithic semiconductor substrate. The resulting monolithic substrate has, then, a sensor and signal conditioner formed therein and angled relative to each other at a predetermined angle.
    Type: Application
    Filed: May 1, 2002
    Publication date: November 21, 2002
    Inventors: Marshall E. E. Smith, Richard W. Stettler, Peter U. Wolff