Patents by Inventor Martha Alyne Harbison

Martha Alyne Harbison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for manufacture of integrated circuit device
    Patent number: 6177360
    Abstract: The invention relates to a process for making an integrated circuit device comprising (i) a substrate, (ii) metallic circuit lines positioned on the substrate, and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the condensation product of silsesquioxane in the presence of a photosensitive or thermally sensitive base generator.
    Type: Grant
    Filed: November 6, 1997
    Date of Patent: January 23, 2001
    Assignee: International Business Machines Corporation
    Inventors: Kenneth Raymond Carter, Robert Frances Cook, Martha Alyne Harbison, Craig Jon Hawker, James Lupton Hedrick, Victor Yee-Way Lee, Eric Gerhard Liniger, Robert Dennis Miller, Willi Volksen, Do Yeung Yoon
  • Process for manufacture of integrated circuit device
    Patent number: 5953627
    Abstract: The invention relates to a process for making an integrated circuit device comprising (I) a substrate, (ii) metallic circuit lines positioned on the substrate, and (iii) a dielectric material positioned on the circuit lines. The dielectric material comprises the condensation product of silsesquioxane precursor in the presence of an organic amine having a boiling point greater than 150.degree. C.
    Type: Grant
    Filed: November 6, 1997
    Date of Patent: September 14, 1999
    Assignee: International Business Machines Corporation
    Inventors: Kenneth Raymond Carter, Robert Francis Cook, Martha Alyne Harbison, Craig Jon Hawker, James Lupton Hedrick, Sung-Mog Kim, Eric Gerhard Liniger, Robert Dennis Miller, Willi Volksen, Do Yeung Yoon