Patents by Inventor Martha Serna Villacis

Martha Serna Villacis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MOLYBDENUM-DAD PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
    Publication number: 20230235451
    Abstract: Molybdenum-DAD precursors are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum-DAD precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
    Type: Application
    Filed: January 24, 2023
    Publication date: July 27, 2023
    Applicants: Applied Materials, Inc., Wayne State University
    Inventors: Thomas Joseph Knisley, Martha Serna Villacis, Mark Saly, Lakmal C. Kalutarage, Charles H. Winter, Matthew Bertram Edward Griffiths, Shalini Tripathi