Patents by Inventor martin Algots

martin Algots has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for supply and recovery of target material
    Patent number: 9699876
    Abstract: An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: July 4, 2017
    Assignee: ASML NETHERLANDS, B.V.
    Inventors: Georgiy Vaschenko, Peter Baumgart, Jeffrey Gacutan, Martin Algots, Theodosios Syrpis, Chirag Rajyaguru, Sanjeev Seshagiri
  • METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
    Publication number: 20140261761
    Abstract: An EUV light source target material handling system is disclosed which may comprise a droplet generator having a target material reservoir in which the target material may be replenished while a nozzle portion of the droplet generator is maintained at temperature. Also disclosed is a system for selectively draining spent target material.
    Type: Application
    Filed: January 9, 2014
    Publication date: September 18, 2014
    Inventors: Georgiy VASCHENKO, Peter Baumgart, Jeffrey Gacutan, martin Algots, Theodosios Syrpis, Chirag Rajyaguru, Sanjeev Seshagiri
  • RAPIDLY TUNABLE LASER SOURCE ASSEMBLY WITH LONG STROKE GRATING MOVER
    Publication number: 20140269808
    Abstract: A laser assembly (10) that generates a beam (12) includes (i) a gain medium (22) that generates the beam (12) when electrical power is directed to the gain medium (22); (ii) a grating (32) positioned in a path of the beam (12); (iii) a grating arm (34) that retains the grating (32); and (iv) a mover assembly (36) that moves the grating arm (34) about a pivot axis (38). The mover assembly (36) includes a coarse mover (344) that makes large scale movements to the grating arm (34), and a fine mover (352) that makes fine movements to the grating arm (34). With this design, the mover assembly (36) can quickly and accurately move the grating (32) over a relatively large range.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Inventors: Michael Pushkarsky, Martin Algots, Satino Marrone, John Craig, Alexander Dromaretsky