Patents by Inventor Martin Andrew Smith

Martin Andrew Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS AND METHODS FOR DETECTING SCRATCHES ON NON-SEMICONDUCTOR WAFER SURFACES
    Publication number: 20100014074
    Abstract: A method of detecting one or more scratches on a surface of a wafer made of a non-semiconductor material is provided. A UV beam is produced from a UV illumination source. The UV beam is incident on a front surface of the wafer. The UV beam being characterized that for scratches of a given material having a UV cutoff wavelength ?cutoff, over 90% of the spectral system response SSR is at wavelengths below ?cutoff?5 nm and expressed as: ? 0 ? cutoff - 5 ? ? nm ? S ? ? S ? ? R ? ( ? ) > 0.90 · ? 0 ? ? S ? ? S ? ? R ? ( ? ) A reflected beam of scattering of the UV beam is detected in response to scratches on a surface of the wafer. The scattering is captured.
    Type: Application
    Filed: July 16, 2008
    Publication date: January 21, 2010
    Inventors: Yun-Biao Xin, Martin Andrew Smith, Ronald Charles Dwelle, Gerard Vurens
  • Systems and methods for detecting scratches on non-semiconductor wafer surfaces
    Patent number: 7649624
    Abstract: A method of detecting one or more scratches on a surface of a wafer made of a non-semiconductor material is provided. A UV beam is produced from a UV illumination source. The UV beam is incident on a front surface of the wafer. The UV beam being characterized that for scratches of a given material having a UV cutoff wavelength ?cutoff, over 90% of the spectral system response SSR is at wavelengths below ?cutoff?5 nm and expressed as: ? 0 ? cutoff - 5 ? nm ? SSR ? ( ? ) > 0.90 · ? 0 ? ? SSR ? ( ? ) A reflected beam of scattering of the UV beam is detected in response to scratches on a surface of the wafer. The scattering is captured.
    Type: Grant
    Filed: July 16, 2008
    Date of Patent: January 19, 2010
    Assignee: Crystal Technology, Inc.
    Inventors: Yun-Biao Xin, Martin Andrew Smith, Ronald Charles Dwelle, Gerard Vurens