Patents by Inventor Martin D. Elzingre

Martin D. Elzingre has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle monitor for loadlock soft pump lines
    Patent number: 5406830
    Abstract: An apparatus and a method provide a particle monitor mounted in an exhaust line of a loadlock chamber. The apparatus of the present invention comprises a particle monitor and a particle filter mounted down stream from the particle monitor away from the loadlock chamber. In one embodiment, the particle filter can be implemented by a wire-mesh screen, or a perforated stainless steel screen. The particle filter can be mounted in a centering ring of a standard vacuum connection which comprises two flanges, a centering ring, and an O-ring held together by a clamp.
    Type: Grant
    Filed: May 14, 1993
    Date of Patent: April 18, 1995
    Assignee: High Yield Technology
    Inventors: Peter G. Borden, Martin D. Elzingre